Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

5 Port Solenoid Valve Series SY3000/5000/7000/9000

= 26n + 172 11 to 20 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 20 stations: W = 52n + 264 SV Manifold base mass w (g) n: Stations (D-sub connector) SY3000 SYJ SY5000 SZ Note 1)For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

ZP

(Pad diameter: 20 mm or less only) ZP T 10 F N B5 A8 With adapter From p. 62 p. 119 From p. 127 ZP T 10 F N J 10 B5 A10 With buffer From p. 65 p. 120 From p. 129 q w e r t y u Ball joint type w Pad diameter t Buffer stroke q Vacuum inlet direction T Vertical R Lateral (With One-touch fitting) 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Stroke [mm] Pad diameter [mm] 10 to 16 20 to 50 10

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9 w @7 !0 y !2 @5 !1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

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X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

Electric Actuators

Horizontal 20 Lateral load 100% 10 Lateral load 50% W 5 Horizontal empty weight deflection 2 Lateral empty weight deflection 1 Load point distance 0.5 Figure 2.

smcmaintenancepartslist

CBG1A Air cushion type Locking at both ends 20 25 32 40 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type Locking at both ends 20 25 32 40 CBG1A20-PS-W CBG1A25-PS-W CBG1A32-PS-W CBG1A40-PS-W Above no. @5, @6, @7, @8, $0, $1. And a grease pack.

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CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

U 10 180 S Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S R73 Number of auto switches With auto switch Size S Nil 1 pc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

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D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

11LEFS Operating humidity range [%RH] 90 or less (No condensation) Motor output/Size 100 W/l40 200 W/l60 400 W/l60 Electric specifications 11LEJS Motor type AC servo motor (200 VAC) Encoder Absolute 20-bit encoder (Resolution: 1048576 p/rev) 25APower consumption [W] Note 6) Horizontal 45 65 210 Vertical 145 175 230 LEC Standby power consumption when operating [W] Note 7) Horizontal 2 2 2

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(With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

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(Type H) VCS 20 1 G Series Lead wire length w 20 30 40 Class 2 Class 3 Class 4 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 Tilt the screwdriver down in direction q so that the clip slides out in direction w. Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Electrical entry G C T TL Grommet Conduit Conduit terminal Conduit terminal with indicator light Clip part no.

REA/REB

RZQ MI W S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

REA/REB

RZQ MI W S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CL

17 19 10 10 10 14 14 85 95 102 113 124 27 32 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252 281 304 356 390 ZZ 43 52 52 65 65 e 11.2 11.2 11.2 12.5 14.0 f 59

Battery-less

Lead 6: LEFS25EB 25 15 Lead 12: LEFS25EA Work load: W [kg] Work load: W [kg] 20 10 15 Lead 12: LEFS25EA 10 Lead 20: LEFS25EH 5 Lead 20: LEFS25EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEFS32EB Lead 8: LEFS32EB 40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEFS32EA 30 Lead 16

LJ1H

10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.