Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

2

IDF55E, 75E Compressed air inlet Compressed air outlet Valve closed Use the bypass piping set on pages 46 and 47.

CATALOG

46 119.2 58 136 173 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

Hydraulic

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

Made to Order

) 46 (46) 10 to 100 117 (127) 127 (127) 107 (127) 10 43.5 (53.5) 53.5 (53.5) 140 (150) 150 (150) 130 (150) 12 53 (63) 63 (63) Note 1) ( ): Denotes the dimensions with auto switch.

1

Note 2) Applicable stroke available by the 5 mm interval. 32 35 (45) 33 (33) 23 (33) 45 (45) 23 Th9 125 120 245 50 120 245 50 40 41.5 (51.5) 39.5 (39.5) 29.5 (39.5) 51.5 (51.5) 28 CM2 140 120 245 50 120 245 50 50 43.5 (53.5) 40.5 (40.5) 30.5 (40.5) 53.5 (53.5) 35 160 130 266.5 50 130 266.5 50 63 49 (59) 46 (46) 36 (46) 59 (59) 35 CG1 180 145 291 55 145 295 55 Courtesy of Steven Engineering

A

46 119.2 58 136 173 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Table of Contents

Y + Stroke X Bearing type Mounting style Bore size Stroke 20-MGG Y X Bore size (mm) Q 86(94) 32 39 25 Copper-free 96(105) 40 46 29 Specifications 109(121) 50 57 31 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 112(124) 63 56 34 Action Double acting 137(151) 80 68 46 Fluid Air 138(152) 100 68 47 Maximum operating pressure 1.0 MPa ( ): Denotes the dimensions for long stroke.

Table of Contents

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

CJ2

Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92

JIS Standard Hydraulic Cylinder

19 20 135 102 150 (mm) Rod series B-series rod Bore size (mm) C-series rod MM A MA D E MM K G H ZZ A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 66 268 0.025 0.064 40 40 36 M20 x 1.5 30 27 22.4 9 19 71 278 M16 x 1.5 25 22 18 7 14 66 268 0.025 0.064 50 46 40 M24 x 1.5 35 32 28 11 24 78 306 M20 x 1.5 30 27 22.4 9 19 73 296 63 55 46 M30 x 1.5 45 42 35.5 13 30 95 346 M24 x 1.5 35

CJ2

B C d H NTJ-015A 10 16 NTJ-010A 8.1 9.2 M4 x 0.7 M5 x 0.8 3.2 4 7 8 Symbol Z ZZ S Stroke Bore size (mm) 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 12 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 45.5 53 65 77 73.5 81 93 105 84.5 92 104 116 45.5 54 66

CQ2

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions.

Table of Contents

46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Table of Contents

(mm) A Weight (g) L M P D Model Nylon Urethane 11 36 10.4 40 14 11 1 8 KQ2U04-U01 2-applicable tubing 10.4 16 4 4.2 4.2 1 4 KQ2U04-U02 42 16 14 13 1 8 KQ2U06-U01 39.5 3 8 KQ2U06-U03 46 45 43.5 17 6 1 4 12.8 KQ2U06-U02 17 14 12.8 39 13.4 13.4 18 40 26 1 8 1 4 KQ2U08-U01 KQ2U08-U02 46.5 46 50.5 52 27 25 15.2 8 15.2 KQ2U08-U03 17 25.6 17.7 18.5 3 8 51.5 45.5 28 1 4 3 8 KQ2U10-U02 KQ2U10-U03

Fluoropolymer Piping Equipment

-F 19 15 LQ1B63-F 25 1" 46 21.2 44.5 LQ1B64-F 19 15 LQ1B66-F 25 1/2" 41 10 29.5 42.5 Note) Products marked are produced upon receipt of order.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm