SMC Corporation of America
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Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 t Applicable bore size (mm) Applicable snap ring 20 25 32, 40 50, 63 80 100 Part no.

Connect to load, if load is to be connected between V and switch Characteristics:Quick response Long life Simple and easy wiring Voltage Output signal is a voltage signal in the range of 1 to 5[V]. The signal has to be converted by a A/D converter for pressure display or switch output. Current Output signal is a current signal in the range of 4 to 20[mA].

Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) Single acting, spring extend CQ2B16-T-PS CQ2B12-T-PS 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS CQ2B20-T-PS Set of left nos. !4, !5, !6. CQ2B25-T-PS CQ2B40-T-PS CQ2B32-T-PS CQ2B50-T-PS Seal kit includes !4, !5, !6.

Note) The controller unit includes either T-nuts or T-brackets. Note) Pay attention to the shape of the connector on the PC.

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm A G 1/2 Tightening torque 0.5 to 0.6 Nm + Mark Mark 2 1 + A Round head combination screw M3 tightening torque 0.5 to 0.6 Nm Conduit terminal View A-A (Internal connection diagram) 16-8-20 21 Series ISA2 Specific Product Precautions 3 Be sure to read before handling. 2 Port Solenoid Valve Series VCA Regulator Series

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

9 12 12 15 15 20 20 20 23 25 27 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 5.4 5.4 6.7 6.7 8.6 8.6 9.5 9.5 11 11 14 14 30.5 36.5 40.5 46.5 54.5 68.5 NPT1/8 NPT1/8 NPT1/8 NPT1/8 NPT1/4 NPT1/4 G1/8 G1/8 G1/8 G1/8 G1/4 G1/4 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 14 16 20 20 26 30 MGPWL, MGPWA 20, 25/A, E Dimensions (mm) MGPWL, MGPWA 32 to 63/A, E Dimensions (mm) Bore

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-79 6 Dimensions Universal type L6 D4 Applicable tubing O.D. d H D1 (Hexagon width across flats) M1 L3 A L4 L5 D3 L1 D2 T L2 Metric Size Inch Size A Model A D1 d T H D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 12.7 17.5 28.7

Setting Position (mm) D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, A34 D-A44 D-B5 D-B6 D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B59W Bore size (mm) A B A B A B A B A B A B A B 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 25 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.5 29.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5 58.0 35.5 55.0 32.5 57.0 34.0 56.5 33.5 53.0

ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L L-bracket (Bracket on a single side) K J H E F G 2 x D t C B A Long clamping screw set for 1 station required for assembly needs to be ordered separately.

port Type 20 Bar stock type Individual wiring SY3 20 SY5 20 SY7 20 P. 37 Direct piping to the main unit of a valve.

EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2 x 2-RA L M Flat washer Data W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Bore size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A 26.5 B 17 B 22 12 16 20 25 M4 x 0.7 8-32UNC 4-40UNC M3 x 0.5 25 24 5 3 32 31.5 5 to 30 4-40UNC M4 x 0.7 8-32UNC M3 x 0.5 5 to 30 26.5 17 31.5 22 29 28 5 3 38 37 1/4-

20 SUP=0.3MPa SUP=0.2MPa SUP=0.2MPa 10 10 0 0 4 12 16 20 8 24 2 4 6 8 10 12 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (for PA3000) PA313 Air consumption 160 Required specification example: Find the pilot air pressure for a discharge rate of 4l/min and a total lifting range of 15m.

DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5020 74 115 152 174 16 15 52 74 136 36 132 32 40 40 34.5 196 25 89 128 169 196 20 21 62 89 153 46 149 42 50 50 141.5 156 199 25 41 84 131 152 172 199 20 16 37 57 84

OR-1717-178P P: PTFE F: FKM OR-3305-178P P: PTFE F: FKM t When external leakage occurs after disassembling a valve, replace the above seals. Wave washer part no.

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5