C95Series

BasidWithout bfacll.et Bore size 3 pes, 1. k: n ! npes. FOOl alldilional options F Flan e T, Center trunnion Applicable auto swnch J32 32mm 40 40mm 50mm 63mm BOmm "so , 63' * Re!el lO tabIt be!o'lr fo, se!

3

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

Pin Clamp Cylinders

-X 545 C(L)KU32 Series Auto Switch Mounting 2 Auto Switch Mounting Height Applicable cylinder: C(L)KU32-X2321 C(L)KU32-X2322 D-P3DWA 44.5 23.5 D-M9V D-M9WV 40 35 D-A7 40 22 546 Auto Switch Mounting C(L)KU32 Series Auto Switch Mounting Bracket Part No.

Soft Start-up Valve

R AV5000-A Flow adjustment needle at low speed air supply D D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

o n ti ti e g a n o a r ti a a e t n 1 t t o o g o 0 1 r e Key r r 0 9 y 2 y y 0 e 8 e e +4 0 K 0 K K +4 0 +4 0 +4 0 0 Key Key 0 (40) 1 Key e g n a r n o ti a t o r y (85) e (40) K (40) A port B port A port B port A port B port A port B port 4 Series CRB1 With Auto Switches Applicable auto switches Auto switch model Electrical entry Indicator light (lights when ON) Yes D-R73 Grommet

Compact manifold regulator ARM5 Series

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the knob is unlocked.

JXCx-OMT0001CN

LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) mm/s 80 100 100 100 [mm/s] () 5 5 5 5 [mm/s] () 7 8 8 8 LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) mm/s 70 80 100 120 [mm/s] () 5 5 5 5 [mm/s] () 8 8 9 9 TM -111No.JXC-OMT0001CN-C Revision history 2015 9 2015 12 A 2016 3 B 2019 3 C 4-14-1, Sotokanda

NAAMS Standards Compliant

XB XC Y Without switch cover With switch cover 50 45 45 5 40 46 88 20 20 46 48 78.4 134 136 92 132 63 55 45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11 8 30

IDUS/IDFS

Series IDFS Series IDFS HA Inlet air temperature C Model IDFS6E IDFS8E IDFS11E AT 740 35 1200 1650 Air flow capacity l/mim(ANR) 614 (640) 996 (850) 1370 (1300) ID 40 35 160 285 230 Power consumption W AMG 170 (259) 240 (292) 295 (337) 40 AFF ( ): Previous model IDF6D/8D/11D AM Improved corrosion resistance with the use of stainless steel heat exchanger Standard evaporation thermometer facilitates

Stainless Steel Heat

35 1200 1650 Air flow capacity l/mim(ANR) 614 (640) 996 (850) 1370 (1300) 40 35 160 285 230 Power consumption W 170 (259) 240 (292) 295 (337) 40 ( ): Previous model IDF6D/8D/11D Series IDUS/IDFS (220/240VAC 50Hz) Improved corrosion resistance with the use of stainless steel heat exchanger Standard evaporation thermometer facilitates daily inspection Compac heat exchanger reduces overall dimensions

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Air flow capacity l/mim(ANR) 614 (640) 996 (850) 1370 (1300) 40 35 160 285 230 Power consumption W 170 (259) 240 (292) 295 (337) 40 ( ): Previous model IDF6D/8D/11D Series IDUS/IDFS (220/240VAC 50Hz) Improved corrosion resistance with the use of stainless steel heat exchanger Standard evaporation thermometer facilitates daily inspection Compac heat exchanger reduces overall dimensions of

Compact Guide Cylinder

. 40 200 32 Caution 100 Handling Precautions 1.

Brake mechanism added

600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to 600 40 80 37 131.5 41 116 56.5 25 92 35.5 30 36 15.5 52 14 19 21 31 76 25 16 M12 x 1.75 11 198 17 Without rod boot With rod boot Bore size (mm) MM N NN P S W l H ZZ e f h ZZ 40 50 63 80 100 M14 x 1.5 27 161.5 1/4 218.5 8 51 280.5 43 11.2 59 288.5 M18 x 1.5 30 175.5 3/8 235.5 0

Rotary Cylinder Series MRQ Size: 32, 40 1

Manufacturers of Friction Fittings/Model Size 32 40 Size 32 40 ISEL Co., Ltd. (Mechanical lock) Adjusting angle per 1 rotation of angle adjusting screw 5.7 4.8 Miki Pully Co.,Ltd. (ETP bushing) Nabeya Kogyo Co., Ltd. (Clamp lock) MA12 x 26 ETP-K-12 CLH-12 x 18 MA14 x 28 ETP-K-14 CLH-14 x 23 Please consult with manufacturers concerning further information on specifications.

Ionizer

Model with 40 mm-pitch emitter cartridges Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Part no.

MRQ

Manufacturers of friction fittings/Models Size Eyesell (Mechanical lock) Miki Pully (ETP bushing) Nabeya Industry (Clamp lock) Adjusting angle per 1 rotation of angle adjusting screw Size MA12 X 26 32 CLH-12 X 18 ETP-K-12 32 40 5.7 4.8 40 MA14 X 28 CLH-14 X 23 ETP-K-14 Consult the manufacturers concerning further information like on specifications.

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

RZQ

(w-e) x PC F=q x PA q, w and e are piston areas.

OMR0032

A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current 10 mA Maximum Output current

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Component Parts SY w Description Material N.C. Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.