Environment

Without Load 800 Lead 4: LEY32C Model Pushing speed [mm/s] Pushing force (Setting input value) Model Pushing speed [mm/s] Pushing force (Setting input value) 700 Lead 8: LEY32B 1 to 4 20% to 65% 1 to 4 40% to 95% 600 LEY25 LEY25A 5 to 20 35% to 65% 5 to 20 60% to 95% Lead 16: LEY32A 500 21 to 35 50% to 65% 21 to 35 80% to 95% Force [N] 1 to 4 20% to

Environment

If the product is operated outside this range (low pushing force), the [INP] signal may be output when the actuator is moving (before pushing). 300 200 LAT 0 100 LEY40 1 to 4 20% to 65% 5 to 20 35% to 65% 21 to 30 50% to 65% LZ 10 20 30 40 50 60 70 80 90 Max. 85% Set value of pushing force [%] LC3F2 Ambient temperature Set value

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

85 95 165 65 85 95 165 Auto switch unit + 2 switches Foot bracket assembly 384 785 993 1722 384 785 993 1722 Caution Be sure to read before handling.

CRB2/CRBU2/CRB1

95 65 85 95 165 1722 785 384 993 384 785 993 1722 Caution Be sure to read before handling.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

85 95 165 65 85 95 165 Auto switch unit + 2 switches Foot bracket assembly 384 785 993 1722 384 785 993 1722 Caution Be sure to read before handling.

Compact Cylinder

Fix the cylinder by using the OA thread that are provided with the cylinder tube. 50 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 100 110 130 150 M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 60 65 70 75 80 85 90 95 100 105 115 135 155 M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 75 S 161 169 209 PP 21 23 27 PB 62 65 75 PA 50 50 65 ZZ 17.5 19.5 23.5 CY1H15 CY1H20 CY1H25 8-15-78 78 Series CY1H Magnetically Coupled Rodless Cylinder High Precision Guide Type Double axes type: 25, 32 CY1HT25/32 138 LL 25 32 4-M thread depth MM PA CY1HT -B MX XB MTS PB MY XA CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

CY1

70 75 S 161 169 209 PP 21 23 27 PB 62 65 75 PA 50 50 65 ZZ 17.5 19.5 23.5 CY1H15 CY1H20 CY1H25 54 Series CY1H Magnetic Rodless Cylinder High Precision Guide Type Dual axis type/ 25, 32 CY1HT25, 32 138 LL 25 32 CY1HT -B 4-M thread depth MM PA XB PB XA S + Stroke 2-Rc(PT)1/8 LW EA EB HC HP H HA HT HB HG NT A N PP PS W Z + Stroke Square nut for body mounting J TW NL (mm) Model A 125 132.5 CY1HT25

MXS Series Air Slide Table

Allowable Force lbf (N) Ambient Temperature Range C MXS8 RB0805 0.72 (0.98) 5 2-20 in/s (50-500 mm/s) 45 183 (814) 45 183 (814) 80 95 (422) 80 55 (245) 80 55 (245) 14 to 140F (-10 to 60C) 1.54 (6.86) 3.59 (15.98) 2.29 (65) 1.54 (6.86) 3.44 (15.30) 2.29 (65) 0.95 (4.22) 1.54 (6.86) 0.88 (25) 0.44 (1.96) 0.95 (4.22) 0.53 (15) 0.44 (1.96) 0.86 (3.83) 0.53 (15) When extended When compressed Spring

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

JA/JAH/JB/JS

65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27

JA/JAH/JB/JS

65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27

Floating Joint

65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 9 9 13 13 13 15 15 18 24 24 24 42 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 10 10 12 12 12

Rotary Table/

67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

Slider Type Ball Screw Drive/11-LEFS Series

10 (2.4) [Origin] Note 4) Origin Note 3) 38 58 2 [4] 4 [2] 34 LES Motor cable (2 x 5) 57.5 6.5 LEPY LEPS 24 Vacuum port Rc1/8 13.9 48 38.5 LER 6 M4 x 0.7 thread depth 8 (F.G. terminal) LEH Motor option: With lock Step motor Servo motor (160.5) Cable length 250 LEY -X5 15 15 65 20 20 20 11LEFS 11LEFS 24 11LEJS 20 Lock cable (3.5) 24 ( ) 3H9 depth 3 +0.025 0 n x 4.5 25A4 48 LEC LEC S 120

3

With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103

Air Cylinder CP Series Cylinder Positioner Assembly

1 2 2 ( 3 1 ) { 1 1 6 ) 2.79 ( 7 1 ) 4.03 1204) 2.56 (65) 3.15 130) 8 3 9 [2r3) E 1 5 7 (40) 4.57 ( 1 1 6 ) 362 (s2) 1 1 8 130) 205 t52) 0.55 ( 1 4 ) 3.94 (100) r.50 (38) (62) 1.34 (35) o.67 (17) M22x1 5 1.57 1 2 2 (31) (126) 2.43 o2) 8.46 1215) 2.56 (65) 0.55 14.0) 3.19 l 8 r ) ea2 1224) 'Min. Slroke = 079 (20mrt) w h Boot Mr limelers i.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.