This is a legacy product, and replaced byAF40P-060S-7-5B

AU

AU200 AU300 11294-5B113010-5B113010-5B AU100 1 8 01 02 03 Element Bronze w 4 1 C22F C23F C22L C23L Bowl guard Filter Lubricator e 3 8 Accessory Gasket for valve guide 16505 16515 16515 NBR r Option Diaphragm assembiy Weather resistant NBR B G Bracket Pressure gauge with limit indicator 13497A 16517AN 16517AN t Flow direction: Left Right Nil Valve assembly Damper 1349173 13504A 13504A 12293

This is a legacy product, and replaced byVFN2120N-5B-02N-X36B, VALVE, NAMUR INTERFACE, S/SOL, VALVE, VFS2000 SOL VALVE 4/5 PORT, EA, VFS2000 BODY PT 1/4NPT (F), 0.62047 lb

Fitting Type: B (Branch Tee), Size Combination: 5B (Tubing: 3/4" x 5/8"; Thread: 1/2"), Piping Type: F (Female), Thread: N (NPT), Packaging: 2 (Packaging Equivalent to Class M3.5 w/PVDF Nut)

76

Signal cable outlet (Electric wire diameter 0.67 (17) or less) Grommet with membrane Power cable holder (Electric wire diameter 0.71 (18) to 0.91 (23) Drain tube for drain pan of condensed water Ventilation air inlet (with dustproof filter) Top view 4 x 0.79 (20) 27.6 (700) 0.039 (1) 4.21 (107) 28.0 (712) 0.079 (2) 13.2 (335) 0.79 (20) Air inlet R2 18.1 (460) 10.5 (267) Air inlet R2 5 Refrigerated

C76

Built-in magnet MB1 Double rod Option Type Mounting style CA2 Stainless steel piston rod, rod end nut and mounting nut Standard R Nil Mounting Symbol Non-rotating rod K Stainless steel piston rod and rod end nut R2 Double end Front nose Front nose in line port E CS1 (Rubber cushion only) F Note) Please refer to page 6-10-46 for additional options. Only one option can be selected.

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

C76

MB1 Double rod Option Type Mounting style CA2 Stainless steel piston rod, rod end nut and mounting nut Standard Non-rotating rod (Rubber cushion only) R Nil Mounting Symbol K Stainless steel piston rod and rod end nut R2 Double end Front nose Front nose in line port E CS1 F Note) Please refer to page 6-10-46 for additional options. Only one option can be selected.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. +

Shock Absorbers and Rate Controls

.63 (l.R)0tl{l l.l 5x2 8.54 8.74 174-t2lJNF .38 l . t 3 1.20 5.43 t.l0 .55 .21 l . t 2 .63 (LR)OIl{ll.25r I 5.92 6.12 r%-r2 UNF .38 t . t 3 1.20 3.81 t.l0 .55 .2t 1.25 .0J (LR)Otlll|.25r2 8.54 8.7 4 r%-r2 UNF .38 t . t 3 1,20 5.43 t . t 0 .55 .21 t.25 .63 ^otesr 1 Alrshdk absorbrs wr]] ldnclro. satistiiCof,t dt 5% of the r narimum raied ener4y per c!

High Vacuum Angle Valve, XL Series

time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber) Principle materials Exterior: Hard anodized Interior: Machined for clean environment Surface treatment 0.4 to 0.7 (58 to 101psi) Actuation pressure MPa M5 (10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2

XL

time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber) Principle materials Exterior: Hard anodized Interior: Machined for clean environment Surface treatment 0.4 to 0.7 (58 to 101psi) Actuation pressure MPa M5 (10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 5, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply Port: Left Side, With regulator, Round type pressure gauge)

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 5, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply Port: Left Side, With regulator, Round type pressure gauge)

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 5, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: L1 (w/Control Unit, Supply Port: Left Side, With regulator, Round type pressure gauge)

Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: G 1/8, Detection Side: G 1/8, Output Specifications: NPN Output, Unit Specification: w/Unit Conversion Function, Stations: 5, Cable Option: Straight, Bracket Option: Bracket, Control Unit: w/Control Unit, Supply Port: Left Side, With regulator, Round type pressure gauge, 2 Port Solenoid Valve Rated Voltage: -

Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: G 1/8, Detection Side: G 1/8, Output Specifications: PNP Output, Unit Specification: w/Unit Conversion Function, Stations: 5, Cable Option: Straight, Bracket Option: Bracket, Control Unit: w/Control Unit, Supply Port: Left Side, With regulator, Round type pressure gauge, 2 Port Solenoid Valve Rated Voltage: -

Control unit: With control unit (supply port: left side), Number of stations: 5 stations, Option: With Bracket, Voltage(V): 24 DC, Detection distance(mm): 0.02 to 0.15, Piping specifications: Supply side (G1/8), detection side (G1/8), Output specifications: PNP 1 output, Unit specification for pressure values: With unit switching function, Regulator: Round type pressure gauge with regulator

ISA3's new display quickly and clearly summarizes workpiece status for the operator.  Establish the switch point in 3 easy steps.  Lower air consumptions, zero exhaust noise, easier wiring, and excellent anti-clogging measures round out this 3rd generation gap checking device.  ISA3 is CE and RoHS compliant, with an IP67 enclosure rating.

ISA3's new display quickly and clearly summarizes workpiece status for the operator.  Establish the switch point in 3 easy steps.  Lower air consumptions, zero exhaust noise, easier wiring, and excellent anti-clogging measures round out this 3rd generation gap checking device.  ISA3 is CE and RoHS compliant, with an IP67 enclosure rating.