Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Hydraulic

Example: M5 x 50l 4pcs.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

ZP3

B C D E Y q Pad dia.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

NDh8 WB WA Section Y detail Y GB GC GA Relief port M5 x 0.8 Mounting nut MM NN WW Rod end nut Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 C D B 0 0.3 B 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F A The overall cylinder length does not change.

Dual Rod Cylinder Series CXSJ/CXS

) N Z L V (Opposite side: Same) QQ TT Q T U R UU (Piping port) (Opposite side: Same) Z L I N W G NN (mm) A B C D E G H I J K L M N P NN F Model 2 x 5.5 through 2 x M4 x 0.7 thread depth 6 2 x M5 x 0.8 thread depth 7.5 2 x M5 x 0.8 thread depth 8 CXS20 64 25 62 23 11.5 50 28 6 12 12 30 10 53 2 x M5 x 0.8 2 x 9.5 counterbore depth 5.3 2 x 6.9 through CXS25 80 30 78 28 14 60 35 6 12 12 30 12

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 34H9 42H9 52H9 65H9 Rc 1/8 (G 1/8, NPT 1/8) 82H9 569 Parallel Style Air Gripper

VZ3000

M5 x 0.8 C4 C6 One-touch fitting for 4 One-touch fitting for 6 3 position exhaust center 3(R) port PE port Note) 1(P), 5(R1), 3(R2) port: M5 x 0.8 4 Rated voltage Manual override 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil: Non-locking push type C: Locking type C (Manual) 3 position pressure center 4 5 24 VDC 12 VDC B: Locking type B (Slotted) 5 6 9 Other

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

C85

N1 G1 KW NA D F KV HR K ZZ Bore C AM WA SW S WB H WH 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 19 6 28 16 7 7 11.5 48{54} 104{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 4.5 12 19 6 10.5 28 16 7 48(53) 104(109) 7(5.5) 11.5(13.5) 10 12 16 14 M6 x 1 M5 x 0.8 M16 x 1.5 6 19.7 18.3 5.5 17 24 5 8 9.5 38 22 10 52(54) 128(130) 8(5.5) 12.5(12.5) 12 16 16 14 M6 x 1 M5 x 0.8

C85

WBWB G1 G1 8 8 to 25 HR N1 N1 Rail mounting type (A) Band mounting type (B) or non-magnet S + Stroke ZZ + 2 x Stroke Wh KK With rod boot C e K 9 9 I f AM h (mm) ND h8 BE KK EE N1 G1 KW NA D F KV HR K ZZ Bore C AM WA SW S WB H WH 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 19 6 28 16 7 7 11.5 48{54} 104{110} 8 12 12 10.5 M4 x 0.7 M5 x 0.8 M12 x 1.25 4 16.7 15 12 4.5 19 6 10.5 28 16

5 Port Solenoid Valve Series SV1000/2000/3000/4000

B C Base mounted plug-in Note) Refer to the S0700 series catalog (CAT.NAS11-88) for symbol.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

10112122Rubber bumper GB GC GA NN MM Mounting nut Relief port M5 x 0.8 Rod end nut NN Cover surface Piping port 2 x M5 x 0.8 C D B 0 0.3 FY FB B 0 0.3 FZ FX 2 x FC Mounting hole Z + Stroke S + Stroke NB H NA F A FT F (mm) FZ 42 42 FY 20 20 FX 33 33 FT 2.3 2.3 FC 5.5 5.5 17.5 19 FB 11 11 GC 17 20 C 15 18.3 B 90 91 Z 54 55 S 9.5 9.5 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 NN M4 x 0.7 M5 x 0.8

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.