Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

LH 0.2 d W W C B D E LY 4-LD MM Width across flats G LT NA NB Y X X Y S + Stroke LX B LS + Stroke ZZ + Stroke With rod boot h + l 10 f l e ZZ + l + Stroke (mm) Bore size (mm) A B a B C D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 d E F G GA GB J K LD LH LS LT LX LY M MA MM NA NB 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 M8 x 1.25 10 17 45 23 60

ISO Standard Hydraulic Cylinder

CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA

ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch (ZSE2) ZX1-K1-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Manual override (Non-locking

SX

A: Orange B: Green 12.5 17 15 17.5 16 14 (Rail mounting hole pitch 12.5) Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

Modular Type Lubricators Series AL

Clearance For Maintenance A E W G AC-A AA Bowl Detail (AF20/AW20) M J N F (2) P1 (Port Size) C D V Q Q IN OUT K Note: Sight glass not applicable to all size 20 bowls. B P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min. Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

0.4

The electrical entry port {VQ1000: G 1/2, VQ2000: G 3/4} permits connection of conduit fittings.

HEC_W-E

Range Setting range : 0.1 to 9.9 C Min. increment : 0.1 C O v e r l o a d J u d g i n g Indicated content : Overload judging temp. range (Ex. : 0.2 C) T e m p .

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

1 1 1 G Normally Closed (N.C.)

PSxx-OMM0006CN

3585RH() AC250 V 1 50 M (DC500 V ) UL Max. 50 2F.S.(25 ) CEUL/CSARoHS 1 01 N01 R1/8 (M5 ) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1

ITV-E

Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t

Possible to transfer a workpiece at low-speed.

End of rotation Rotation starting point 5 5 5 5 5 e R g ot n End of rotation B ra at n io n io ra at n ot 5 g e R A B R o 5 t a 5 ti o n B r Rotation starting point a End of rotation n g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.