Model: 0 to -101kPa, Piping: ø1/4" One-touch Fitting, Elbow Type, Output: NPN Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: -, Made to Order: -

Piping: ø4, ø5/32" One-touch Fitting, Straight Type, Output: NPN Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: -, Made to Order: -

Model: -100 to 100kPa, Piping: ø1/4" One-touch Fitting, Elbow Type, Output: NPN Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: -, Made to Order: -

Model: -100 to 100kPa, Piping: ø4, ø5/32" One-touch Fitting, Straight Type, Output: NPN Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: -, Made to Order: -

Model: 0 to -101kPa, Piping: ø6 One-touch Fitting, Elbow Type, Output: NPN Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: -, Made to Order: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

E-P HYREG ® Series VY1 1

12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note

AR20-B to AR60-B

to 0.2 MPa setting G36-4-01-L G46-4-01-L Square *4 embedded type Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] NPN output, Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch *5 NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] PNP output

EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

Vacuum

(zx1A) N,O. N,C. (NVJ114) u,1A K1 o a K3 a o K5 o a a o (blank) Wilhout valve unit Nzxl!

Vacuum

(zx1A) N,O. N,C. (NVJ114) u,1A K1 o a K3 a o K5 o a a o (blank) Wilhout valve unit Nzxl!

7ND9071en

Check using a feeler gauge that the clearance between the position indicator (109) and the electronics cover is 1 mm. 7 ND90 71 en 17 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000H Valve Positioner Position Transmitter X300 Ui (Vmax) = 28 V Ii (Imax) = 120 mA Pi (Pmax) = 1 W Li = 53 uH Ci = 22 nF Ex i Barrier + 1 Uo (Voc) 28 V Io (Isc) 120 mA Po 1 W

HEC-OM-S008

] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYP

"n" pcs. Nil S n Cylinder bore size 15 32 15mm 32mm Type of auto switch Nil Without auto switch Select auto switches from the table below.

HRX-OM-S004

OFF Press together OFF ( 0 . 7 i n ) Fig. 4-7 Alarm release 8. Repeat steps 1 to 4 to supply the circulating fluid to the users equipment and piping.