2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

Vacuum Pad: Ball Joint Type

M5 x 0.8 N: M8 x 1.25 Model A B C D Model ZPT10F-B5 F NL P F NL P F P 10 12 10 12.5 27 1.5 ZPT13F-B5 ZPT20F20 22 13 15 32 36 36 12.5 15.5 10.5 13 27.5 ZPT16F-B5 ZPT25F5 9 8 12 14 2 25 28 16 18 ZPT32F32 36.5 36.5 13 16 32 35 40 50 B8 01 ZPT F(Without buffer/Female thread) Hexagon width across flats P N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 4) Always use line receivers to receive the output signals. * The functions allocated to the input signals /DEC, P-OT, N-OT, /EXT1, /EXT2 and /EXT3, and the output signals /SO1, /SO2 and /SO3 can be changed by setting the parameters.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

CG5-S

(mm) Connection threads Connection threads Model Model KGU04-M5 M5 x 0.8 M5 x 0.8 KGT04-M5 4 4 -01 R 1/8 R 1/8 -01 -02 R 1/4 R 1/4 -02 KGU06-M5 M5 x 0.8 KGT06-M5 M5 x 0.8 -01 R 1/8 R 1/8 -01 6 <M5 type> 6 <M5 type> -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU08-01 R 1/8 R 1/8 KGT08-01 8 8 -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU10-02 R 1/4 R 1/8 KGT10-01 10 -03 R 3/8 R 1/4 -02

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

R R ot ot at at R io io ot n n at ra ra A io n gl e n n n a g dj g ra us e e ti A ng A n of n g ng of gl e di e le k re of k a e ad dj ct e y ke us io ju y n st gr ti y gr n in g o gr g o o di oo di o v re re v e ve ct e ct io 9 io 9 18 n 0 n 0 0 Angle adjusting screw The rotation range under the adjustment of an angle at 120 is indicated below.

VQ7-6/7-8

1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Options FPG Nil N None Indicator light Indicator light with surge voltage suppressor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Z FIG V 5 (R1) 3 (R2) 1 (P) Optional

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

SMC

11 3 Vacuum sunction port M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA-M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end 12 6 N-M5 x 0.8 thread depth 6 (Insert) 6 4-M5 x 0.8 thread depth 7 1 (With stroke adjuster at extension

125

Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula

Rotary One-touch Fittings Series KS/KX

Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h

VFR

External pilot port Rc 1/8 6.8 to 10 G 1/2 4-Rc 1/8 (PE port) 4-Rc 1/8 (PE port) 208.5 196.5 External pilot port PE X PE PE PE Rc 1/8 X EB EA P EB EA P 81 67 50 31 81 67 50 31 6-Rc 3/4 (P , EA, EB port) 37 37 43 72 61 37 37 6-Rc 3/4 (P , EA, EB port) 72 61 43 Formula for manifold weight M = 0.811n + 1.231 (kg) n: Stations n: Station Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust