SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

7 t CRB2 Single vane For 180 (Indicates intermediate position) For 90 (Indicates A port pressurized) CRBU2 CRB1 @1 Component Parts MSU !1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

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l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

4/5 Port Air Operated Valve Series SYJA3000 1

closed center (B) 2 (A) 4 (B) 2 (A) 4 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.

Compact Cylinder with Air Cushion

-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l M8 x 90l x 100l x 110l x 135l x 160l M10 x 105l x 115l x 140l x 165l M10 x 120l x 130l x 155l x 180l M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l 9 8 9.5 13.5

RQ

-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l M8 x 90l x 100l x 110l x 135l x 160l M10 x 105l x 115l x 140l x 165l M10 x 120l x 130l x 155l x 180l 9 8 9.5 13.5

MXH

9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !

KK/KK13

(P) Male thread type A T L H L (mm) T Connection male thread Weight g Effective area mm L Min. bore A Body size H Width across flats Model L KK3P-01MS R 1/8 8.4 26.4 30.4 10 1/8 18.4 -02MS R 1/4 22.6 14.2 27.4 33.4 6 KK4P-01MS R 1/8 17 33 37 14 -02MS R 1/4 20.2 34.2 40.2 1/4 25.2 -03MS 9 R 3/8 50.9 32.5 35.7 42.2 17 -04MS R 1/2 57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1

IDX-OM-W029

IDX-OM-W029-B / Series IDU22E-23(-C,L,R,T,V) IDU22E-30(-C,L,M,R,T) IDU37E-23(-C,L,R,T,V) IDU37E-30(-C,L,M,R,T) IDU55E-23(-C,L,R,T,V) IDU55E-30(-C,L,M,R,T) IDU75E-23(-C,L,R,T,V) IDU75E-30(-C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General

HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA RE A B Both Ends Tapped (mm) Bore size (mm) O1 R O1 thread REC R R 32 M6 x 1.0 10 40 M6 x 1.0 10 CX 50 M8 x 1.25 14 CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC H thread effective

MU

Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

VHK

2 port valve 3 port valve Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 12F 6 06F M5 x 0.8 M5 8 08F R 01S 02S 03S 04S 1 8 R 1 4 R 3 8 R 1 2 10 10F 12 12F M5 x 0.8 M5 R 01S 02S 03S 04S 1 8 R 1 4 R 3 8 R 1 2 Standard Type 1(P): One-touch fitting 2(A): One-touch

MLU

8 RLQ MLU ML1C DB At the time of shipment -X @7 20Data Retraction locking C M(D)LUB25 Component Parts Description Material Note Description Material Note No. q w e r t y u i o !0 !1 !2 No. !5 !6 !7 !8 !

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

Clean Gas Filter

Construction q t e r w IN Description No.

Soft Start-up Valve AV2000/3000/4000/5000 1

AL High speed supply 1/2 PP PA PP PA 1 (P) 2 2 (A) 1 Since piston B t holds the fully open condition, during normal operation the cylinders speed will be controlled by the usual meter-out control. Normal operation 1/2 PP PA 3 (R) When pilot valve w is turned OFF, spring r pushes piston A e and q upward and opens R port while shutting off the air supply from P port.

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Vacuum Pad: Ball Joint Type

ZPR Series Pad Diameter: 10 to 32 Pad Diameter: 10 to 32 r Buffer r Buffer t Adapter e Adapter q Pad q Pad With buffer With buffer Pad Diameter: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adapter t Adapter Lock ring Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.