Micro Mechanical Valve Series VM1000

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F .O.F .* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

reduces flow setting time

AS AS-FE A L5 D2 KE AS-FG AS-FP L2 L1 T H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS231FS1-01-23 (S) 3.2 ASP 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 20 15 14 AS231FS1-01-04 (S) 4 8.2 13.9 25.1 AS231FS1-01-06 (S) 6 10.4 26.2 20.4 38.8 15 AS231FS1-01-08 (S) 8 13.2 10.2 16.4 30.1 21.5 40 14.2

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

MY1

head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA

KJ

(inch) Model H1 (Width across flats) H2 (Width across flats) T (M) Mounting hole M Min. port size Connection thread R Weight (g) L1 L2 Mounting plate thickness 7 mm or less 30 31 36 3 16 KQ2E07-02 KQ2E05-01 17 17 1 8 28 32.5 35 M16 x 1 17 11.5 14.5 15 14.5 14.5 18.5 M22 x 1 74 M14 x 1 M14 x 1 15 15 16.5 17 18.5 4.6 17 17 19 24 3.5 1 4 1 4 3 8 Applicable tubing 5 16 KQ2E09-03 19 6 3 8 21 KQ2E11

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

and lock override. 22.8 (GZ, GS: 23.8) [23.8] (Non-locking) Manual override 85.6 (GZ, GS: 87.6) [87.6] G: 300 H: 600 87.2 (GZ, GS: 88.6) [90.6] (Lead wire length) 51.5 [58] 48.6 8.5 45 39.1 32.5 21.5 6 6 10 4-Rc(PT)1/8 (Piping port) 17 17 15 45.5 24 32 [ ] for AC L plug connector (L): SYJ5240-lLll-01 M plug connector (M): SYJ5240-lMll-01 2-4.3 (Mounting holes) 2-4.3 (Mounting holes) 24

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS AS-FE A L5 D2 KE AS-FG AS-FG AS-FP L2 L1 T H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS231FSG1-01-23 (S) 3.2 ASP 13.3 24 17.5 36 43.9 42.4 40.8 39.3 13.3 21.5 16.2 14 AS231FSG1-01-04 (S) 4 8.2 13.9 25.1 AS231FSG1-01-06 (S) 6 10.4 26.2 20.4 38.8 15 AS231FSG1-01-08 (S) 8 13.2 10.2 16.4 30.1

KR

(mm) Connection thread Rc Model M Weight (g) Mounting hole T (M) L2 L1 Nylon Urethane Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting plate thickness 7 mm or less KGE04-01 1 8 14 16 16 35 11 15 11 15 17 7.5 13 27.5 31 28 31.5 33.5 27.5 33 M12 x 1 13 4 5.6

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

ASD AS D2 L5 A AS-FE KE AS-FG AS-FG T AS-FP L2 L1 H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS23l1FG-01-23(S)A 3.2 13.3 24 17.5 36 30.6 29.2 27.5 26.1 13.3 10 (9) AS23l1FG-01-04(S)A 4 8.2 13.9 25.1 10 (10) AS23l1FG-01-06(S)A 6 10.4 26.2 20.4 38.8 AS23l1FG-01-08(S)A 8 13.2 10.2

HRX-OM-W002

Flow Sensor t t EV1 EV2 PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 2 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 10 12 13 15 5 7 2 1 4 4 4 14

Air Slide Table

MXQ 6A-mm4 With buffer, end lock (6) J Q 5 5.5 Pilot port 2 x M5 x 0.8 0.5 7.5 15 8.5 5 3 31.4 34 21 23 3 28 3 2 x M3 x 0.5 thread depth 5 MXQ6A-10Z4 M Pilot port 2 x M5 x 0.8 17.5 16.6 2.3 (Plug: Width across flats 7) Dimensions [mm] 5.5 Model J Q Standard type Shorter total length type ZZ M M MXQ6A-10Zl4 57.5 25 81.5 72 77 MXQ6A-20Zl4 91.5 82 MXQ6A-30Zl4 78.5 J 5 ZZ * Dimensions other than

Rubber seal 5 Port Solenoid Valve Series SYJ7000

manifold mounting) 1/8 (A, B port) One-touch fitting (A, B port) (4.9) 2-3.2 (For mounting) (Light/surge voltage suppressor) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" 35 36 + 28 25 16.1 31.5 [38.5] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (W0): SYJ7220-W0-01

VZ100/300/500

pilot port) VQ M5 x 0.8 (PE port) VKF VQZ VZ VS M plug connector (M) VZ34-M-01 DIN terminal (D) VZ34-D-01 L plug connector (L) VZ34-L-01 VFN 300 (Lead wire length) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) : With light/surge voltage suppressor 4-6-17 18 Series VZ300 Manifold Specifications Manifold Specifications For external pilot For internal pilot 20-1 40R-2 40-2 40R-1 40

MY1

orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

4/5 Port Air Operated Valve Series SYJA3000

Type 40 (5 Port/Base mounted) How to Order SS5YJ740 05 01 P port 1/4 Thread type Stations 01 1/8 A, B port size Nil F N T 02 Rc G NPT NPTF 2 stations : : R port 1/4 20 20 stations Applicable solenoid valve SYJ740SYJ743A, B port Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

MGP

Table 1 How to calculate the kinetic energy of load Bore size (mm) Allowable kinetic energy (J) 12 0.043 16 0.075 M+m 2 u=1.4ua u Ek= 2 20 0.11 25 0.18 Ek : Kinetic energy (J) M : Weight of driven object m : Weight of cylinder moving part (kg) u : Max. speed (m/s) ua: Average speed (m/s) 32 0.29 40 0.52 50 0.91 63 1.54 80 2.71 100 4.54 Note) Select a cylinder so that "Ek" does not exceed

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.