MLGC

86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 37 40 160 50 140 30 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 19 22 142 110 42 45 80 35 194 170 19 Data J K L H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

IIIIIII

t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)

Mechanical Valves Series NVM, NVFM, NVZNI

t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)

CE

x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Air Slide Table/Long Stroke Type Series MXY

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

SFOD-OMT0009CN

() 7.1 XX X 512 2048 X 0 1 0 1 X 1 () X 1 INP ON INP ON() X 1 () X 1 () X 1 X 14 1 4 [] (1) 1 12 23 24 3 1 2 3 4 (2) 1 12 13 14 1 14 X 14 4 1 2 1++ X 2+ 1) 48 No.SFOD-OMT0009CN-B 7.2 XX X -= ID 1) +[ mm] XX (+) 1) -[ mm] XX (-) 1) [ mm/s] [mm/s] HOLDRESET 1) 1) INP [ mm] XX [ mm] 0mm M (0mm) 100mm 1) XX M (100mm) (+) (-) 1) XX 1 1) 49 No.SFOD-OMT0009CN-B

Rotary Table

Top mounting (Body tapped) L4 L5 L6 Size Screw Max. screw-in Height Counterbore depth [mm] [mm] depth [mm] 10 M5 x 0.8 6 6 3.9 20 M6 x 1 6 8 4.5 30 M6 x 1 6 8 4.5 50 M8 x 1.25 8 8.5 5.6 -28- With interchangeable plate 4.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MY3A40 MY3A63 A B C E G H HG JJ KK L LD LL LW M N 55 06.0 18 2 09.5 27 05.0 M4 x 0.7 05.0 065 03.5 22.5 041 06 13.5 M5 x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model

JXCx-OMT0001CN

() Max step data Num 512 2048 X 0 1: Activated axis 0 1 X 1) Pushing force () X 1) INP ON Trigger level INP ON() X 1) () X Pushing speed 1) () X Moving force 1) X Axis name 14 14 [] (1)1 :12 :23 :24 :3 1 2 3 4 (2)1 :12 :13 :14 :1 ORIG order 1 4 X 4 4 Adapter file version 1: 2:+ Para protect 1 2 X 1 -48No.JXC-OMT0001CN-C 9.2 XX X () Controller ID 1) [mm] XX Stroke(+) 1)

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.

IZx-OMT0049

5) (Recommended screw: Cross recessed round head screw M4 x 8) (Recommended screw: Cross recessed pan head screw M4 x 8) (Recommended screw: Cross recessed pan head screw M4 x 8) Section A-A (1:1) AC adapterIZT40/41/42 IZT40-CG1( with AC cord) AC cord AC adapter IZT40-CG2 (without AC cord) Inlet IEC60320-C6 AC adapter 7.

Vacuum Gripper

Digital pressure switch ZSE20---M5-LA2 PD P # P V Circuit diagram -14No. TQ1230001-OM106-B 5. Dimensions 5.1. Vacuum Gripper 60(Operating range 50 to 70) 60(Operating range 50 to 70) * Cup distance is changeable. -15No. TQ1230001-OM106-B 5.2. Center of gravity (ZXP7A-ZPB25JN-X1-KA) Y Z X X Z (Unit: mm) Center of gravity X Y Z Y -1.77 -1.18 52.07 -16No. TQ1230001-OM106-B 5.3.

VCL

216.5 255 293.5 332 370.5 409 101 L1 124.5 166 207.5 249 290.5 332 373.5 415 83 VV2CL4 L2 136.5 178 219.5 261 302.5 344 385.5 427 95 L3 148.5 190 231.5 273 314.5 356 397.5 439 107 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction

VCS

1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2+ 3 stns. 2 stns. + 3 stns x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Dimensions (mm) Electrical entry J E H C G B D Z A Grommet: G Conduit: C Conduit terminal: T Model Y X N T S R Q VV2CS2 77 99 66 41.5 44 50.5 22 34.5 4.5 17.3 24.5 38 20 28 56 49 VV2CS3 86.5 101 68 51 45.5 60 24 38.5 5.5 19.3 28.5 42 25.5 30 66 57 VV2CS4