Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

ZISE20A.eng

.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) F0 Function setting F1 Function setting F99 Function setting : Some products do not have all the functions. If no function is available or selected due to configuration of other functions, [-] is displayed on the sub display (right).

ZISE20.eng

Piping specification: -01, -N01 After hand tightening, hold the hexagonal spanner flats of the pressure port with a spanner, and tighten with 2 to 3 rotations. As a reference, the tightening torque is 3 to 5 Nm. When tightening, do not hold the Z/ISE20 body with a spanner. Pressure second or longer simultaneously.

Vacuum gripper

Completion drawing Plate A Hexagon socket button bolt (M6x8) With gasket(M-6G) Tightening torque 10.1Nm Plug(M-3P) (4 pcs) Tighten by hand, and give it an additional turn approx. 1/4 rotations with a wrench.

Fan Type Ionizer

L Pin No.

Series KC Self-seal Fittings

A1 M A2 D L Part No.

Compact Cylinder

(D-M9A(V)L can be used with a lead wire of 0.5 m and 3 m.) Note 3) 1 m (M): D-M9(V), M9W(V), M9A(V)L only.

MXQ

MXQ6(L) 6 19 7 7 M2.5 x 6 12.5 M2.5 x 8 8 2.5 6 8.3 M5 x 0.8 M MXQ-AS6(L)-X11 15 26.5 MXQ-AS8(L) 5 19.5 B MXQ8(L) 7 22 7.5 8 14.6 9 3 7 9.8 MXQ-AS8(L)-X11 M3 x 8 M3 x 10 15 29.5 M6 x 1 F MXQ-AS8(L)-X12 25 39.5 E G MXQ-AS12(L) 5 23.5 MXQ12(L) M4 x 12 M4 x 12 M8 x 1 MXQ-AS12(L)-X11 9.5 29 11 12 18.5 14 4 10.5 12.7 15 33.5 C MXQ-AS12(L)-X12 25 43.5 MXQ-AS16(L) 5 24.5 Table mounting section

Air Slide Table Series MXS

MTS Retraction End Body mounting section Table mounting section D E E1 H H Q L G K M B C J A MXS-BT8 P F MXS-BT20 MXS-BT25 MXS-BT8 MXS-BT12 MXS-BT16 N Body mounting section A Table mounting section Applicable size Model B C D E E1 F G H P K L M N Q J MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) MXS-BT8 (L) 38 23 12.5 14 40.8 5 8 12 1.4 M3 x 12 16.6 7 15.5 14.6 M3 x 16 M8 x 1 MXS-BT12

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

10

Bore size [mm] Dd9 L l m d Part no.

Air Cylinder Series CS1

Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Since there are other applicable auto switches than listed, refer to page 6-9-30 for details.

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)