SMC Corporation of America
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Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

Customer's cable connection Terminal block for signal L1 L2 L3 1,2: Operation 3,4: Failure 5,6: Remote control 1 3 2 4 5 6 Terminal connecting screw: M5 Crimped terminal width: 9.5mm or less Applicable electric wire: 3.5mm2 or more Customer's cable connection Applicable electric wire: 1.25 to 1.5mm2 Terminal block for power supply L1,L2,L3: Power supply PE: Ground L2 L3 PE L1 Customer's cable

Orifice and Port Size Combinations Class Orifice size (mm) T Conduit terminal (1) Port size 4 2 3 7 5 10 1/8 (6A) 2 1/4 (8A) 1/4 (8A) 3 3/8 (10A) 1/2 (15A) 1/4 (8A) Available types of electrical entry are either G, C and T.

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Output 1 Output 2 A B C Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 14.8 VR1211F-04 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 6.8 VR1211F-06 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 Inch Size Weight (g) Model d D1 D2 L3 L2 D3 L1

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 10 20 30 40 50 0 2 4 6 8 10

How to order manifold T C VV3QZ15 08 N7 How to order valves VQZ215R 5M 02 Thread type (Cylinder port and 1(P), 3(R) port) External pilot specifications Nil Rc How to order manifold N NPT Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T NPTF VV3QZ25 06C6C R F G Cylinder

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

(mm) Connection thread R 10 D1 Note) D2 Model L1 L2 FR soft nylon FR double layer KRK06-02S KRK06-01S 1 8 12 10 33 13 21 35 25 26 36 33 MS 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 10 18 36.5 35 1 4 19 3.4 14 17 12 14 17 6 12.8 6.9 KRK06-03S 37 19.7 3 8 1 8 Applicable tubing T KRK08-01S KRK08-02S KRK08-03S KRK10-01S KRK10-02S KRK10-03S 1 4 3 8 1 8 1 4 3 8 39 41 42 43.5 45 15.2 12

T Type Interface: (T) M5 X 0.8, 1/8, 1/4, 3/8, 1/2 Makes it easy to diverge air out with T type interface.

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6

3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 70 87 104 121 138 155 172 189 206 223 240 257 274 291 308 325 342 359 376 393 410 427 L1 L2 (MP) L2 (AP) 195.5 212.5 229.5 246.5 263.5 280.5 297.5 314.5 331.5 348.5 365.5 382.5 399.5 416.5 433.5 450.5 467.5 484.5 501.5 518.5 535.5 552.5 215.5 232.5 249.5 266.5 283.5 300.5 317.5 334.5 351.5 368.5 385.5 402.5 419.5 436.5 453.5 470.5

element Drain cock D side Outlet for check Control unit n: Stations L Stations Formula 20n + 21 20n + 176 20n + 232.5 4 101 5 121 6 141 7 161 8 181 9 201 10 221 11 241 12 261 13 281 14 301 15 321 16 341 17 361 18 381 19 401 20 421 21 441 22 461 23 481 24 501 3 81 236 256 276 296 316 336 356 376 396 416 436 456 476 496 516 536 556 576 596 616 636 656 292.5 L1 L2 (MP) L2 (AP) 312.5 332.5

4 t !0 @4 @1 u q !6 y @3 r !0 w !2 !4 o t !0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more MGJ 12 to 25 50 stroke or less JMGP MGP MGP MGPW 12 to 25 Over 50 stroke MGQ 50 or more MGG MGC MGF Component Parts Component Parts MGZ No.

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

(Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219 357 253.5 L2 81 322.5 127.5 196.5 300 162 231 369