Aluminum High Vacuum Angle Valve Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.
, 400, 500 750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.
Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179
Piston speed [mm/s] Maximum air consumption Q [Nl/min.] 100 125 2 300 400 500 300 400 500 80 150 200 150 200 63 50 100 100 32 40 30 40 50 30 40 50 25 20 20 20 15 15 16 10 10 8 2000 10 5 4 1500 3 1000 2 6 500 400 300 1 1 200 0.5 100 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Working pressure [MPa] 1.8-26 Series CP95 Average air consumption of compressed air cylinders and piping Thermal loss is not represented
size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250
300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.
) 39.6[46.6] Approx. 300 <43.5> (Lead wire length) + 40.7[42.9] <42.9> 30.9[33.1] <33.1> 25.9 2 2 Other dimensions are same as grommet style.
X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207 330 6 2 300 11-LEFG32-S-250 400 257 380 11-LEFG32-S-300 450 307 430 11-LEFG32-S-350 500 357 480 8 3 450 11-LEFG32-S-400 550 407 530 11-LEFG32-S-450 600 457 580 Model L A B n D E 11-LEFG32-S-500 650 507 630 10 4 600
AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900
500 100 200 300 500 Figure 1.
70% Stroke mm AS2201F -01-08 AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components
3 3.5 2.5 3 3.5 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note 1) S coupler and fitting are included in the same package.
14.8 SY Lead wire color: Black E Lead wire color: Red 2-2.7 SYJ 12 3.7 (Mounting hole) 18.1 (Lead wire length) (Latching) VK Latching and large flow capacity style (Lead wire length) 35.6 300 42 300 40.7 VZ Locking style manual override VT 4.18 (100V AC or more) VT VP 30.7 VG 11 A P VP (5.9) (4. 1) (5.9) 7 5 5 5 9.7 4.9 4.9 3-M5 (M3) 31.4 37.8 VQ ( ): M3 Broken line: Latching and large
128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106
350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0
Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400
distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1
Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.
M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.
l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than