Precision Cylinder Series MTS

6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

VK3000

VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11

VK3000

VK300-82-2-01 100 VAC V100 VK300-82-2-03 110V 110 VAC 200 VAC 220 VAC VK300-82-2-02 200V VK300-82-2-04 220V S070 240V 6V 12V 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal VQD VQD-V Light (Built-in connector) Marking Circuit with light AC Circuit diagram 12 VDC or less Circuit diagram 24 VDC or more Circuit

RLQ

Description RLQ40 RLQ50 RLQ63 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C 2 Metal speed controller 5 2 Male elbow By-pass tubing Spatter cover 6 1 2 7 8 9-12-18 19 Series RLQ Compact Cylinder with Air Cushion and Lock Accessory Bracket Dimensions Single knuckle

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 6) Note 6) Note 6) Note 6) Note 6) Note 1) When using a non-relieving type with a backflow function, if the inlet pressure is increased slowly, the inlet pressure may continue to the outlet side.

Compact Cylinder with Lock Series CLQ

15.0 19.6 25.4 31.2 37.0 47.3 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 8 10 10 14 18 22 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 -0.050 -0.093 -0.065 -0.117 17 Compact Cylinder with Lock Series CLQ Simple Joint/32 to 100 A type mounting brackets 2-D T1 T2 M W V U F B E (mm) Joint and mounting brackets (A, B type) part nos.

Compact Cylinder with Air Cushion Series RQ

L d m t D d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft 21 25.6 41.6 50.6 7.6 9.6 9.6 13.4 16.2 20.2 36.2 44.2 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 20 25 32, 40 50 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 5 6 8 11 13 17 22 27 15.0 19.6 25.4 31.2 IY-G02 IY-G03 IY-G04 IY-G05 NT-02 NT-03 NT-04 NT-05 8 10 10 14 0.040 0.076 0.040 0.076 0.040 0.076 0.050

Series CE1

6 NBR Valve seal #6 Port joint 40 to 63 Stainless steel !

Compact Cylinder with Air Cushion and Lock Series RLQ

6 6 6.5 Number of auto switch D-F7LF D-A9 D-F9 D-A79W 7.5 7.5 8 D-F7LF 7.5 D-F9, F9V D-F9W, F9WV D-F9BAL 1 pc. 2 pcs. 20 20 20 20 25 25 20 20 5.5 5.5 5.5 6.5 The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

VEX-OMV0001

No.VEX-OMV0001 / / VEX1 -2, 3 / -4 -5 -5 -5 -5 -5, 6 -6 -6 -79 -1012 1 VEX-OMV0001 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Modular Type Lubricator Series AL

to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size 10 20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

IR30-OM00013

No.I R30-O M 00013A / Series IR3000 IR3010 IR3020 23 1. 4 2. 5 3. 6 4. 6 5. 710 6. 10 7. 11 8. 12 -1- (ISO/IEC)(JIS) *1) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial

Flame Resistant

With One-touch fitting Port size 01 1/8 02 1/4 03 3/8 04 1/2 Thread type G G thread 1 Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS21F-W2D Series Needle Valve/Flow Rate Characteristics Construction AS2201F-G01, AS2211F-G01 AS2201F-G02, AS2211F-G02 e t w u Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa o !

AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without