3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting holes 70 300 M5: M5 thread 19.3 (Lead wire length) R2.7 22.5 29.5 SY A 11 15 27 34

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

wire length) 54<59> VS7 Indicator light 300 117<119> Indicator light 300 129<131> 54<55> (Lead wire length) 60<61> 49<52.5> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-39 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 2 position single 0 1 01 02 Grommet(G): VQZ215 (R)lGl 300 84.5 (Lead wire length) 2-4.5Mounting holes 54.5 24 9 9 R4 13 A 4 B 2 15 34

Direct Solenoid

$l (1r0) 1.38 (35) o.67 (n o.71 (r8) 't.34 (34) 1.18 (30) Mlmoters in Parenthoss 20 DIRECTIONAL AIR VALVES SUBPLATES SERIES NVS4et24,4oB4 NVS IO24 SUBPLATES Gonaral; Sub.plates are heaw duty aluminum dle castings.

Basic Type/Direct Mount Type

x V Effective thread length Y H A B E G Mounting nut width across flats C H B G E NN Effective thread length T NN (R) NA Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34

Related Products

Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98

Round Type Hydraulic Cylinder

0.025 0.064 0.025 0.064 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 23 f8 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 25 f8 5.5 1/8 81 M24 x 1.5 13 28 19 15 143 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 31 f8 7.5 1/8 87 M30 x 1.5 13 36 19 15 159 40 Up to 800 21 M33 x 2 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 34

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

16 34 A B 11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Auto Switch Proper Mounting Position (mm) (mm) Auto Switch Mounting Height D-M9 D-M9W D-M9 D-M9W D-A9 Auto switch model Auto switch model D-A9 B A B A Bore size Bore size 20 25 32 40 Hs 30.5 59.5 34 55.5 20 25 32 40 Note) The above values are a guide in the stroke end detection of the mounting positions of the auto switch.

SMC Pneumatic Clean Series

-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Stroke length tolerance Piston speed 0 +1.4 Up to 300st mm Basic style / Axial foot style / Rod side flange style / Head side flange style Mounting style Grease 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease Particle generation grade (Refer to front matter pages 13 to 22 for details.) 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 34

SMC

16 34 A B 11 12 6.6 12 38 2 7 A B NN-M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 6H9 depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34(35.5) 3.5(2) 24(25.5) 6.5(8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) Note 1) The above mentioned values are indicated as a guide for auto switch mounting position for stroke end detection. When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch.

15

Contents 6 CYS06-37 -AJ024-R CYS06-37AAJ024-R 10 CYS10-37 -AJ025-R CYS10-37AAJ025-R 15 Set of the nos. 25, 26, 33 Set of the nos. 34, 41 Set of the nos. 37 BMY3-016 20 CYS20-37 -AJ027-R CYS20-37AAJ027-R 25 DCYS25-37 -AJ028-R 32 CYS32-37 -AJ029-R CYS32-37AAJ029-R 40 -X Note 3) A switch spacer, as specified in the table above will be required if an auto switch is mounted afterward.

Vacuum Unit

Ejector Specifications Suction Filter Item Model ZK2m07 ZK2m10 ZK2m12 ZK2m15 Nozzle diameter [mm] 0.7 1.0 1.2 1.5 Nominal filtration rating 30 m Port exhaust [L/min (ANR)] 34 56 74 89 Silencer exhaust/ Complex exhaust [L/min (ANR)] 29 44 61 67 Filtration area 510 mm2 Max. suction flow7 High-noise reduction silencer exhaust [L/min (ANR)] 34 56 72 83 Air consumption7 [L/min (ANR)] 24 40 58

Stability of suction position,

ZP3EA-TAL16 [Weight: 99.8 g] Width across flats 19 Rc1/8 M14 x 1 M16 x 1.5 Rc1/8 Width across flats 22 6 6 25 15 40 9 5 5 25 34 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM Applicable pad part no.

NCA1

60 87 110 163 225 289 6000 5 30 56 82 102 152 208 274 8000 4 26 50 76 93 137 188 245 10 3 21 45 70 89 125 172 222 12000 17 41 65 84 118 155 210 16000 9 34 57 75 110 142 188 HOW TO USE THIS TABLE 20 8 28 52 68 103 136 172 30 5 12 39 55 87 120 156 40 11 22 43 74 108 142 1 From Stroke Factors Table (see Table 1 on page 21), 50 9 15 30 66 96 130 determine the value of L. 60 14 18 57 88 119 2

AMH

Refer to dimensions on pages 14-20-34 to 14-2035 for details. Sight glass Tempered glass AMH850 is aluminum casted. Replacement Parts AMH450 Model No.

CRQ2

shaft DD W D CRQ2 I K Auto switch MSQ b (10) Max. 2Rc 1/8 (Port size) H F MRQ (US) (UW) DCB Q BC 20M N BB BA BA G D A (AU)Max S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) Rotating angle A AU B BA BB Size BE J JA JB BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25 M10 x 1.5 M10 x 1.5 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Note) Refer to page 11-1-34 for allowable kinetic energy. 3 Correspondence to equivalent conventional free-mount types Rotary table MSUB1 MSUB3 MSUB7 MSUB20 Free-mount rotary actuator CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 Table Rotation Range Weight (g) Angle adjustment is possible as shown in the drawings below using adjustment bolts (A) and (B).

RHC

0.074 0 100 16 110 80 10 13 95 20 25 63 30 90 Up to 1500 116 40 37 80 0.074 0 Data ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 27 ND 25 MM 31 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 Bore size (mm) 50 52 63 342 10 37 1/2 215 27 24.5 31 M18 x 1.5 7.5 80 60 95 10 289 55 80 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 100 391 13 47 3/4 236 41 34

Auto Switch Guide

D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 6-16-28 Grommet 6-16-29 Connector 6-16-30 Band 6-16-31 Terminal conduit 6-16-32 6-16-33 Grommet 6-16-34