Series VCS

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

AC Servo Motor Driver (Pulse input type)

(Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.

AC Servo Motor Driver (SSCNET /H Type)

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -38- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

VCA

S = 6mm 5. S = 15mm 4. S = 10mm 7. S = 27mm 5. S = 15mm 7. S = 27mm 10. S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1.

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

Bag Filter

When making a selection, designate the flow rate as 300 L/min when viscosity is equivalent to water.

MXH

300 (mm/s) or Less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L (mm) 8-2-12 11 Compact Slide Series MXH Selection Graph (4) to (12) (Horizontal mounting) Maximum Speed 100 mm/s or Less Maximum Speed 500 mm/s or Less Maximum Speed 300 mm/s or Less Graph (10) Load Eccentricity 50 mm Graph (7) Load Eccentricity 50 mm Graph (4) Load Eccentricity 50 mm 10 1 10 1 0.1 MX Weight m (kg) Weight

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Thread type Mounting bolt and gasket are not included.

SL5200

Vespel is a registered trademark of DuPont. 29 Single Stage Regulator for Ultra High Purity Intermediate flow Series SL5800 For UHP gas delivery Inlet pressure: Max. 300 psig (2.1 MPa) Flow capacity to 200 slpm Body material: 316L SS secondary remelt Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL58 S M FV4 FV4 02 2PW Delivery pressure Bonnet option

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

Auto Switch Guide

Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.

VCS

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K N.C.

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2

Hydraulic

/4"(6.3) rubber hose 10 Cylinder bore size 20 9 8 7 6 5 6 5 4 (steel pipe I.D.) 4 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 400 500 2.8 Flow velocity inside pipe (m/s) Piston speed (mm/s) How to read the chart: Example) The required flow rate necessary to operate a 50 cylinder at a speed of 100mm/s is 12l/min.

MXF

500 700 Average speed Va (mm/s) Collision speed V (mm/s) Note) Use the average speed when calculating static moment.

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

3 Way Direct Acting NVKF 300 Series

T \ l Main Parts $mim llUlff 300 3-Pofl/nhscl 0mmud $olenoid Urlrs Series NVKF300 Manifold Soecifications Valve stations 2-20 stations (max.)

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19