VCL

62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and

SQ1000/2000

08/10 Dual flow fitting SSQ2000-52AP. 44 P. 46 P. 47 P. 48 C10 N11 P R D side U side Individual SUP spacer SSQ2000-P-3Silencer (for EXH port) EXH block plate SSQ2000-B-R Port plug VVQZ2000-CP P. 44 P. 46 P. 47 P. 48 C8 L8 P R D side SMC AN200 U side Special wiring specification (-K) D-sub connector Individual EXH spacer SSQ2000-R-3Back pressure check valve (-B) SSQ2000-BP Built-in silencer

Series VCL

62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4

Round Type Hydraulic Cylinder

B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5 (23) 3.6 (1.1) 8.9 (6.4) 26.4 (23.9) 26.7 (24.2) 30.6 (28.1) 35.5 (33) 13-/22-MXS6 13-/22-MXS8 13-/22-MXS12 13-/22-MXS16 13-/22-MXS20 13-/22-MXS25 5.9 4.5 5.6 5.6 5.6 17.6 23.6 45.9 (43.4) 39.4 (36.9) 36.7 (34.2) 29.6 (27.1) 34.5 (32) 7.6 5 47.9 6.9 10.9 5.9 14.9 22.9 68.4 (65.9) 59.7 (57.2) 57.6 (55.1) 50.5 (48

SMC

8.1) 15.5 (13) 3.6 (1.1) 3.9 (1.4) 16.4 (13.9) 16.7 (14.2) 20.6 (18.1) 25.5 (23) 3.6 (1.1) 8.9 (6.4) 26.4 (23.9) 26.7 (24.2) 30.6 (28.1) 35.5 (33) 13-/22-MXS6 13-/22-MXS8 13-/22-MXS12 13-/22-MXS16 13-/22-MXS20 13-/22-MXS25 5.9 4.5 5.6 5.6 23.6 5.6 17.6 45.9 (43.4) 39.4 (36.9) 36.7 (34.2) 29.6 (27.1) 34.5 (32) 7.6 5 47.9 6.9 5.9 22.9 10.9 14.9 68.4 (65.9) 59.7 (57.2) 57.6 (55.1) 50.5 (48

Rotary Actuator

[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8

1

VX021S-1-16FB 12 VDC 100 VAC 110 VAC 200 VAC C18312G6GCU None 220 VAC 230 VAC 240 VAC 24 VAC 48 VAC 24 VDC GDM2A-L5 12 VDC GDM2A-L6 100 VAC GDM2A-L1 110 VAC GDM2A-L1 200 VAC GDM2A-L2 220 VAC GDM2A-L2 230 VAC GDM2A-L2 240 VAC GDM2A-L2 24 VAC GDM2A-L5 48 VAC GDM2A-L15 With light * Select an appropriate DIN connector suitable for the coil insulation type. 7 XSA Series Specific Product Precautions

MY1

VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48

Compact Cylinder with Air Cushion

Flange material: Carbon steel Rod end nut L1 Rear flange type Rear flange type/RQG, RDQG mm Bore size (mm) Stroke range (mm) A 15 to 50 20 44.5 FV FW 15 to 50 25 49.5 mm B + Stroke A + Stroke 2-6.6 L Bore size (mm) 8 FX B L FV FW FX FZ FZ 20 4.5 40.5 60 32 39 48 Rod end male threads 25 5 44.5 64 36.5 42 52 } Rear flange type Double clevis type Applicable (All dimensions but A is identical

CM2

Y-020B Y-032B Y-040B size +0.2 +0.1 9 18 Type C 9 for axis 46 9 CDP-1 16 20 25 36 M8 x 1.25 5 14 +0.2 +0.1 25, 32 9 18 Type C 9 for axis 48 9 CDP-1 18 20 25 38 M10 x 1.25 5 14 +0.3 +0.1 40 16 38 68 12 3 x 18l CDP-3 22 24 49.7 55 M14 x 1.5 13 25 Clevis pin and snap ring (cotter pin for 40) are attached.

ARM10/11

L 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 IR NO. L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

RQ

Data Flange material: Carbon steel Rod end nut L1 Head Side Flange Style Head side flange style: RQG/RDQG Bore size (mm) Stroke range (mm) A 20 15 to 50 44.5 FV FW 25 15 to 50 49.5 B + Stroke A + Stroke 2-6.6 L Bore size (mm) 8 FX B L FV FW FX FZ FZ 20 4.5 40.5 60 32 39 48 Rod end male thread 25 5 44.5 64 36.5 42 52 } (All dimensions but A is identical to those of the basic style.)

MLGP

48 52 300 300 300 86 110 124 118 146 158 106 130 142 M8 x 1.25 M8 x 1.25 21.5 130 M10 x 1.5 M10 x 1.5 28 130 M10 x 1.5 M10 x 1.5 WB Bore size (mm) 34 36 38 X XA XB YY YL Z XC XL st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 50 66 80 22 24 24 40 50 63 M8 x 1.25 16 20 20 4 5 5 172 174 174 3 4 4 46 48 50 84 86 88 6 8 8 122 124 124 4.5 6 6 M10 x 1.5 M10 x 1.5 Dimensions A, DB

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE1l3l 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE1l4l 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2l 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3l 1 120 90 55 32 73 100 106

44

Width across flat Width across flat Effective area (mm2) 2 x Applicable tubing Weight (g) L M d Model H1 H2 KC M L I.D. 2.5 3 4 6 7.5 8 9 10 13 4 4 6 8 10 10 12 12 16 KFG2L0425-00 KFG2L0403-00 KFG2L0604-00 KFG2L0806-00 KFG2L1075-00 KFG2L1008-00 KFG2L1209-00 KFG2L1210-00 KFG2L1613-00 H1 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 7 8 13.3 5 8 13 28 47 46 51 48 89 d KK 9 12

Fieldbus System

Dimensions n: Stations (Maximum 16 stations) (mm) 1 L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 234 L1 L2 131 156 181 206 231 256 281 306 331 356 381 406 431 456 481 506 209 259 284 309 334 359 384 409 434 459 484 509 534 559 584 48 Series EX600 Specific Product Precautions 1 Be sure to read this before handling.

PS-OMH0005CN

(ZS-26-D) 48 (ZS-26-D) () (ZS-26-01) (ZS-26-B) 90 IP65(48IP40) 1/41/2 0.58 mm -13No.PS-OMH0005CN-D 2 -14No.PS-OMH0005CN-D FG () AWG No.

LV50-OMQ0002

After installation, the flow direction can be changed by setting.Refer to Operation in page 48 for details for setting.