1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Find the inertial moment B for the rotation of shaft (B). 3 + m2 a22 + K (Example) When shape of m2 is a sphere, refer to 7, and K = m2 2r2 2.

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Cylinder with Lock Series MNB

C 2-J (Double side) S + Stroke Width across flats B1 A F GB K BN GF Cushion valve H1 Rc(PT)P Rear cylinder port MM Q E D V LY 4LD LH Width across flats Y X X Y N T LX VA LT LS + Stroke ZZ + Stroke LZ (mm) Width across flats Bore size (mm) Stroke range (mm) Effective thread length (mm) Ee11 GL A B1 H1 B2 BN C D F GB GD GF B GL1 GR GE BP GA GC 30 8.5 32 to 700 22 17 6 46 97 32.5 12 13 13 13

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

Series VQ Metal Seal/Rubber Seal Body Ported

Description Note q Material No.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

CJ5-S

3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !1 Valve retainer gasket Rod end nut Stainless steel 304 !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CJ5-S

3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !1 Valve retainer gasket Rod end nut Stainless steel 304 !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Material Description q Rod cover A Clear hard anodized Aluminum alloy Data w Rod cover B Clear hard anodized Aluminum alloy Set of the nos. !1, !2, !3, !

Thermo-chiller/Rack Mount Type

: 20 [dm3] : 4.2 x 103 [J/(kgK)] : 305 [K] (32 [C]) : 293 [K] (20 [C]) : 12 [K] (= T0 Tt) : 900 [s] (= 15 [min]) Example of conventional units (Reference) : Unknown [cal/h] [W] : Water : (= r x V) [kgf] : 1 [kgf/L] : 20 [L] : 1.0 x 103 [cal/(kgfC)] Heat quantity by cooled substance (per unit time) Q Cooled substance Cooled substance weight m Cooled substance weight volume ratio c Cooled

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

IR1000/2000/3000

Description IRV1000 IRV2000 IRV3000 Bracket P53801018 P53802016 P53803013 Pressure gauge GZ33-K-01 GZ43-K-01 GZ43-K-01 Precision of pressure gauge within 3% (Full span) 14-5-17 17 Series IR1000/2000/3000 Construction !5 !5 t o o o !0 t !0 o !

IDG

Drain Thread size: 1/4 (Without valve mechanism) Hexagon width across flats 19 (Maintenance space 100 mm or more) Purge air discharge tubing port for dehumidification Applicable tubing I.D. : 19 (NPT threads: 3/4 inch) With float type auto-drain With drain guide Port size A B C D E F G H K L M N Model P 255 276 Q 241 262 IDG60M/60HM IDG75M/75HM/100M/100HM 191 186 101 80 365 204 202 104 90

Rotary Table/

2 q @0 u !

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !