Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Title not found

1/4" ons-lqgslr 1;a'aa 3/8 one-toucn fiftrng l0mrn one louch trh nq 12mm one-louch fin nq sv4000 Rc 38 Rc 3/8 G 1/4 G 3'l8 G 3/8 'ln case or mixed speciricatio.

Rotary Cylinder Series MRQ Size: 32, 40 1

Load at end of lever Position of rotational axis: Perpendicular to the plate through one end 2 1 2 2 a + K = m1 + m2 3 a Ex.) When shape of W2 is a sphere, refer to u, and 4a + b 2 1 2 4a + b 2 2 2 = m1 + m2 12 12 It becomes K = m2 2r2 5 5. Thin rectangular plate (Rectangular parallelepiped) 10.

3-Position Rotary Table

3 @0 !7 @5 !1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

Series CE1

(Shield) 4.4-8 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3!0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !

MRQ

3 Compact hexagon nut Stainless steel Platinum silver !4 !5 !6 !7 !8 !

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

Compact Cylinder with Air Cushion Series RQ

3 wire (PNP) Note 3) When ordering foot brackets, order 2 pieces per cylinder.

1.63

Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 P3DWA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9PAV1 M9BAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire

RB/RBL/RBQ

RB2725 S (Stroke) RHC Model 96 115 115 134 210 229 287 478 5 6 6 7 11 12 15 25 MK(2) 3 RS Q G RS H A RZQ 4.

A

3000 4 4000 5 5000, 6000 Model Port Size Exh Port A B C D E F G H L O C K I N G O P T I O N NVHS2500 1/8, 1/4 1/8 60 20 12.8 40 44 33 28 7.5 0 Standard 5 Lockable NVHS3500 1/4, 3/8 1/4 73 29 12.8 53 53 42 29 7.7 NVHS4500 1/4, 3/8, 1/2 3/8 85 32 12.6 70 64 49 36 10 NVHS5500 3/4, 1 1/2 136 56 32 90 80 65 54 10 I N P U T P O R T S I Z E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 H A N D L E C O

HRX-OM-Q026

contact output signal . 3-25 3.3.8 RS-485 communication wiring . 3-26 3.3.9 RS-232C communication wiring . 3-27 3.4 Piping . 3-28 3.5 Circulating Fluid Supply . 3-31 3.5.1 Automatic water fill function . 3-31 3.5.2 Fluid supply without using the automatic water fill function . 3-33 3.5.3 Option K Water fill port . 3-35 3.5.4 Option M Applicable to deionized water piping . 3-35 Chapter 4 Starting

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Slider Type/Ball Bushing Bearing

9 @0 q !6 !5 i y !7 e !0 u !8 !3 !4 #0 !1 o !2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Direct Solenoid

N V S 3 r Valvo Fealuro3 D = Recessed non-locking manualoperator K = Recessed locking manual operator (AC only) O = Rubbr "Solenoid Accss" plug (AC only) 2 = Class 2 3 = Cla88 3 4 = Class 4 ttounllng 5 = Mounting, pipe tap In body 0 3 = 0 4 = O 7 = 0 9 = 1 0 = 220V 50Hz 24 VAC 60Hz ll5/120V 60Hz or 100/110V 50Hz 23O|24OV a0qzot 2OO/22OV sotlz 4@V 60t'z 12 Vrc 50Hz 12 VDC 24 VDC (DC not available

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

TL TG effective depth TL TD TB TC D (g6) DD (h9) A AU B BA BB BE J JA JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (

Process Valve

4 Valve size 5/6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical