Compact Cylinder with Air Cushion Series RQ

H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end

V

4 VXD2130-02 10 1.9 34 0.5 0.4 0.9 0.7 0.02 0.7 0.5 3/8 VXD2130-03 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 3/8 VXD2140-03 15 4.5 80 1.5 0.7 0.7 1 1 0.02 0.02 0.5 1/2 VXD2130-04 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 1/2 VXD2140-04 15 5.5 100 0.7 0.7 1 1 0.02 1 1 3/4 VXD2150-06 20 9.5 170 0.7 0.7 1 1 T E C H N I C A L SPECIFICATIONS E N E R G I Z E D C L O S E D T Y P E S E R I E S VXD 1MPa = 145PSI

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

/N.O. 1 2 3 4 5 A B C Switch Made to Order Nil J Without switch With switch Main valve fluororubber (Refer to page 411.)

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

SZ3000

Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor The common polarity should be the same as the common specifications of the valve to be used.

HEC_W-E

OF USE -1-1 1.2 OPERATION BY EXTERNAL COMMUNICATION -1-1 1.3 CONTENTS OF OPERATION MANUAL-1-2 2 SAFETY INSTRUCTIONS -2-1 2.1 BEFORE USING THE THERMO-CON -2-1 2.1.1 SAFETY TRAINING -2-1 2.1.2 IDENTIFICATION OF DANGER, WARNING, CAUTION AND NOTE -2-1 2.2 WARNING LABEL AND CAUTION LABEL -2-3 2.2.1 THE POSITION OF ATTACHING WARNING LABEL AND CAUTION LABEL -2-3 2.3 PRECAUTIONS FOR RUNNING -2-4

CM2

1 !

Model Selection 1

Insertion Tool Needle Valve P. 17-5-132 P. 17-5-128 Type Class Series Applicable tubing O.D. 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" Metric size LQ-GJ LQ-GK 1, 2 LVN Inch size J type K type LQ-GL LQ-GM 1, 2, 3, 4, 5, 6 L type M type High Purity Fluoropolymer Tubing P. 17-5-136 Series Tubing O.D. 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA Metric size TL Inch size TIL 17-5-

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

Solid State Auto Switches

Note 1) Refer to page 1568 for reed auto switch common specifications.

Soft Start-up Valve

D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59

IDX-OM-W035

. 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 5-2 (IDFB55E,75E) . 5-3 -1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 K 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 9-4 . 9-3 9-5 . 9-3 10 S 10-1 . 10-1 10-2 . 10-1

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

CY1F

Bore size (mm) Allowable kinetic energy for intermediate stop Es (J) 10 0.03 15 0.13 25 0.45 5 Series CY1F Model Selection 2 Selection Calculation The selection calculation finds the load factors (n) of the items below, where the total (n) does not exceed 1. n = 1 + 2 + 3 1 Load factor n 1=m/mmax Item Note Review m m max is the maximum load mass at a zMaximum load mass 2=M/Mmax Review M1

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Series VCS

VCS414 VCS415 VCS 17 1 0 5 1 5 20 1 5 1 0 25 20 1 5 30 25 25 2.

Thermo-con/Rack Mount Type

400 W (Tap water)*1 510 W (Tap water)*1 800 W (Tap water)*2 1 kW (Tap water)*2 Heating capacity 600 W (Tap water)*1 1 kW (Tap water)*1 1.2 kW (Tap water)*1 1.4 kW (Tap water)*2 2 kW (Tap water)*2 Temperature stability*3 0.01 to 0.03C Pump capacity Refer to the performance charts.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

Series VCL

J L Bracket part no.