Magnet: Built-in Magnet, Mounting: Double Clevis, Bore: 80mm, Thread: Rc, Stroke: 150mm, Rod Boot: None, Cushion: Air Cushion, Accessory 1: Pivot Bracket, Accessory 2: Double Knuckle Joint, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in Magnet, Mounting: Clevis, Type: Rubber Bumper, Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire

Magnet: Built-in Magnet, Mounting: Head Trunnion, Bore Size: 40mm, Port Thread: NPT, Stroke: 150mm, Rod End Thread: Male Rod End, Pivot Bracket: Pivot Bracket, shipped w/Product, Rod End Bracket: Double Knuckle Joint, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: 5m, Number: -

Magnet: Built-in Magnet, Mounting: Clevis, Type: Air Cushion, Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the Case

Magnet: None, Mounting: Clevis, Type: Air Cushion, Bore: 40mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the Case of No Switch

Magnet: None, Mounting: Rod Trunnion, Type: Rubber Bumper, Bore: 63mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewire Connection: 0.5m (Or None in the Case

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Rubber Bumper, Bore: 50mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal,

Magnet: Built-in, Type: Pneumatic, Mounting: Single Clevis, Bore: 40mm, Port Thread: NPT, Stroke: 150mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: -, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, Bore: 20mm, Port Thread: Rc, Stroke: 150mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: H7BW--Solid State, 2-color Indication, 2 Wire, Leadwire or Prewired Connector: 3m, Number: -

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: A (Air Cushion), Bore: 32mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

LEC-OM07605CN

(1) LECSS2-TAC200V240V (4) (4) RA1 ON OFF RA1 MC MC SK MCCB CNP1 MC (7) MC (6) (11) (10) L1 CNP3 (6) AC 200 V 240 V U U L2 AC200240V V V L3 M W NW P3 (1) (10) (1) (9) PE P4 CNP2 P+ (2) C (2) (11) (3) (10) (3) D CN2 L11 L21 (7) (8) CN3 CN3 DC 24 V ( 12) DC24V (11) (5) 2 EM2 DOCOM (5)2 (5) (5) (4) RA1 ALM (4) DICOM DC 24 V ( 12) DC24V (11) (8) CN8 (9) () () 1. P3P4() 2.

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW

Series SV

SV1000 SV2000 SV3000 0 NW QW 1 2 3 P, E port position Input block Supply/Exhaust block assembly specification Input block type Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3 pins) A, B port size For mixed mounting, indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 150mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 150mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion:

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 150mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting