ZP3

w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Profi-E

S. f or t arget val ue i s 12bi t , com m uni cat i on i s avai l abl e up t o 150% F. S. ( accuracy i s guarant eed up t o 100% F. S. ) . O ver range error i s out put w hen 150% F. S. i s exceeded.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Vacuum System Peripherals:

Nil DC: 1 W (With indicator light: 1.05 W) None With light/surge voltage suppressor (Possible only solenoid valve connector type.)

•

: ~ T,::;:,:' 3-w". (NPN) b-v G39 1 e , i,,",, 2-wi," K39 -1 i DiagnostiC Indication I'" 3-~,e (NPN) 1 5V, 12 \ M9NW Relay, PLe 3-w", (PNP) It . ~ .. (2-ColOr indication) 2-~-,"24 V I ( ~ .' Grommet , , 3-wi,.

New

Manufacturers Association) Body Series VXN material Air Air Medium vacuum Medium vacuum Oil Water C37 (Brass), Stainless steel Power consumption 4.5 W (Size 1) 7 W (Size 2) 20 W (Size 3) (DC) C37 (Brass) body Stainless steel body Body Series VX2 material Air Air Aluminum, Resin Power consumption 4.5 W (Size 1) 7 W (Size 2) 10.5 W (Size 3) (DC) Aluminum body Resin body CAT.ES70-48A Series

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

550 62.2 63.2 77 81 151 289 504 Body of rotary actuator Auto switch unit + 2 switches Angle adjuster 30 30 50 60 46.5 30 47 90 150 203 83 Series CRBU2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except standard shaft type (W).

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

3 Port Solenoid Valve Series VQ100 1

(42 mA) 24 VDC 1 W (42 mA) 0.7 W (29 mA) (3) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (5 mA) 1.2 VA (6 mA)

VCC

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

T

Symbol B W BU N Color Black White Blue Translucent 3. The minimum bending radius indicates the value, at which the tubing gets bended at the temperature of 20C.

Ionizer Nozzle type IZN10 Series IZS

150 mm, capacitance: 20 pF) as defined in the U.S.

SMC Electronic Switch Series Variations

ZSM 18 NPN Open Collector 1 output w/ analog output, 3 revolution adjustment Lead wire length PFl 0.6m 19 NPN Open Collector 1 output w/ analog output, 200 revolution adjustment 3m 30 IFl 55 PNP Open Collector 1 output w/o analog output, 200 revolution adjustment 5m 50 ZSE1/ISE1 Specifications ZSE1 101kPa to 0 ISE1L 0 to 100kPa ISE1 0 to 1MPa Model Operating pressure range 200kPa 1MPa Max

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

MXF

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

HEC_W-E

specification 2: AC200-220V Cooling method W: Water-cooled Cooling capacity 006: 600W 012: 1200W 4.2 Manufacturing years method of display SERIAL No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface