Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

L3 A3 Graph (1) Load Weight: W Mr Static moment Dynamic moment MXY6 W My W L3 A3 0.6 A2 L2 Rubber stopper screw MX Load weight W kg Mr 0.5 L1 A1 Metal stopper screw Mp 0.4 W MTS My W 0.3 W MY 0.2 Mey Mep 0.1 We CY We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1,2,3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined (Refer to page 5 for vertical operation.)

39

2 @1 @2 w r Description Replaceable kits list Component parts No.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

MLGP

static load) N 157 245 402 629 982 1559 2513 3927 Standard Strokes Bore size (mm) Standard stroke (mm) 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed

MLGP

static load) N 157 245 402 629 982 1559 2513 3927 Standard Strokes Bore size (mm) Standard stroke (mm) 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed

CM2

CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Air Cylinder NCA1 Series

w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Slider Type/Ball Bushing Bearing

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Support Guide/11-LEFG Series

(= E) 150 60 Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG40-S-150 354 157 328 4 150 11-LEFG40-S-200 404 207 378 6 2 300 11-LEFG40-S-250 454 257 428 11-LEFG40-S-300 504 307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(kg) Data Pitch moment Yaw moment Roll moment W L2 A2 L1 A1 L3 A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.

LEF-OM002xx

Weight Model LEFS16A Stroke(mm) 50 100 150 200 250 300 350 400 450 500 Weight(kg) 0.83 0.9 0.98 1.05 1.13 1.2 1.28 1.35 1.43 1.5 0.12 Additional w eight for lock(kg) Model LEFS25A Stroke(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Weight(kg) 1.70 1.84 1.98 2.12 2.26 2.40 2.54 2.68 2.82 2.96 3.10 3.24 3.38 3.52 3.66 3.80 0.26 Additional w eight for lock(kg)

C95Series

" SO, "63 a.5 25, 50, 75, 100,125, 150, 175, 200, 250.300, 350. 400. 450, 500 40 " !

Profile Design ISO/VDMA Air Cylinder Series CP95

See page 11 for dimensions Mounting accessories, rod GKM KJ JA Rod clevis DIN 71752 Piston rod ball joint DIN 648 Floating joint bore Supplied with bolts and safety devices 32 40 50 63 80 100 GKM 10-20 GKM12-24 GKM16-32 GKM16-32 GKM20-40 GKM20-40 KJ10 D KJ12 D KJ16 D KJ16 D KJ20D KJ20D JA30-10-125 JA40-12-125 JA50-16-150 JA50-16-150 JAH50-20-150 JAH50-20-150 See page 18 for dimensions See

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100