LECP6_C

B RESET 49 - +JOG +1-052 B RESET 1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESET SVON (1) D 50 - ON (M24V) 1-145 RESET SVON (1) D 1-146 RESET SVON (1) D (C24V) RESET SVON (1) 1-147 D (1-148) RESET SVON

7

1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !1 o t o u B u OUT (P2) w C IN(P1) A r r OUT(P2) IN (P1) e e C w IN(P1) q q VXD27, 28, 29 VXD25, 26 Component Parts Operation When coil !2 is energized, armature assembly !1 is attracted by core i and pilot valve A is open.

FGD-E

1/13 FGX-OM-L005-C Product Name Industrial Filter Model / Series / Product Number FGD series 2/13 FGX-OM-L005-C Contents Safety Instructions 3 Parts Descriptions and Functions 6 Product Specifications 7 How to Order 7 Dimensions 8 Installation and Piping 9 Maintenance 9 Maintenance parts 10 3 3/13 FGX-OM-L005 FGX L005-C Industrial Filter Safety Instructions Industrial Filter Industrial Filter

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M8 x 1.25 M10 x 1.5 MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K 9.5 16.0 15.0 L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M8 x 1.25 M10 x 1.5 MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K 9.5 16.0 15.0 L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7

CUJ

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

-0.064 25 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 14.5 81 11 15 3.5 5.5 142 157 32 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 18.5 87 13 20 3 4 160 179 40 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 22.5 108 16 20 5 0 182 205 9 Hydraulic Cylinder: 7MPa Series CHN Accessories (Standard) Rod end nut Material: Carbon steel Mounting nut Material: Carbon steel 30 30 d d C D C D H B H B Part no. d H B C

PC Wiring System Series PCW

5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Compact body VQD How to Order Valve VZS VQZ2 1 5 5 1 M C VFS Symbol Compact body 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 1 2 3 4 5 VS Port size {4(A), 2(B) port} Symbol Port size Without sub-plate Rc (PT) 1/8 VS7 (1) 01 Note 1) Except for metal seals.

RQ

D E F H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D C 5.5 12.5 20.5 28 28 38 Auto switch model Bore size (mm) 6 10 15 20 25 32 9 7 9 9 9 11 6 10 15 20 25 32 5.5 2.5 5.5 3 1 1 2 5 2 4.5 6.5 6.5 4.5 7.5 4.5 7 9 9 15.5 22.5

Plate Cylinder with Lock Series MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Auto Switch Guide

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

Auto Switch Guide

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

Auto Switch Guide

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

CQS

2 6 7 Long stroke 5[-2.5] 4.5[-2] 10[-7.5] 12[-9.5] 5 5.5 9 10 5 5.5 9 10 7 6 11.5 13.5 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 12 16 20 25 11 10.5 16 18 19.5 21.5 25 27 1 0.5 6 8 17 19 22.5 24.5 7 6 11.5 13.5 Bore size (mm) Anti-lateral load 1[3.5] 0.5[3] 3.5[-1] 5.5[-3] 6 5.5 9 10 12 16 20 25 0.5 1 5 7 6 5.5 9 10 0.5 1 5 7 17 19 22.5 24.5 10 9.5 13 14 5 5.5 9.5 11.5 5 4.5 0.5 1.5 10 9.5

Mechanically Jointed Rodless Cylinder Series MY2

NT NH PE PD LB NW C LW NV LD T-slot for body mounting NC MY2H40G LE H7 depth R GB Cushion needle 2 x P 2 x P 2 x P (Hexagon socket head taper plug) (Hexagon socket head taper plug) 2 x P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5