Fluid Standard specifications Option Note) Air (Standard, Dry) Vacuum (up to 1.3 x 102 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 101 Pa)(V) Non-leak (106 Pam3/s or less) (V) Other Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.
D1 L3 M D2 L1 Connecting thread T L2 H D1 D2 L1 L2 L3 L4 (1) A (2) Max.
D1 L3 D2 M Connecting thread T L1 L2 Model Applicable tubing O.D.d T Uni thread H D1 D2 L1 L2 L3 L4 A Max.
Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side)), Operation Manual/Calibration Certificate
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate
Size: 100, Motor Mounting Position: D (In-line), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: D (3.33mm), Stroke: 100mm, Motor Option: w/o Option, Rod End Thread: M (Rod End Male Thread), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: N2 (LECSN2-T9/without Network Card, 200V to 240V), I/O Cable Length: 1 (
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Switch OFF Time [s]
Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: M (SI units only), Bracket: S (Bracket (mounting position: Stream side))
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Size: 100, Motor Mounting Position: D (In-line), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: L (2mm), Stroke: 1000mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: N2 (LECSN2-T9/without Network Card, 200V to 240V), I/O Cable Length: H (w/