Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option:

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment

Compact and light weight., Digital 2 color indication., Elbow piping can be used., Integrated flow adjustment valve., Several combinations are possible., Different mounting methods are possible., 2-Color Digital Flow Switch for Air, PFM, DIGITAL FLOW SWITCH, 95.00000 lb

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

5 Port Solenoid Valve Series SY3000/5000/7000/9000

16.2 VQZ (20) 15 EA P EB 28.1 [35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9

SY

2 to 20 2 to 8 2 to 16 2 to 17 2 to 16 Location Direction Base Side C8 (8 One-touch fitting) C10 (10 One-touch fitting) D-sub connector type A, B port specifications SY3000 SY5000 P, R port Port size SY3000 SY5000 SY3000 SY5000 C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting)/C8 (8 One-touch fitting) C6: P to A/B 4.68 (0.26), A/B to R 4.68

1

2 !3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

SX

stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch fitting for 6 C6 One-touch fitting

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-5LOU-C6 2 sets (Double solenoid part no.)

SQ1000/2000

Stations 1 2 3 4 5 6 7 8 n Lead wire length: L0/Approx. 600mm L1/Approx. 1500mm L2/Approx. 3000mm C8: SUP port C8: EXH port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads Formulas: L1 = 11.5n + 44.5, L2 = 11.5n + 59 n:

VQZ1000/2000/3000

2 2 A A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5

V100

(g) Applicable valve model Applicable stations Series Base model Port size Port location 1(P), 3(R) 2(A) C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 2 stations: 83 Addition per/station: 19 2 to 20 stations VV3QZ12VQZ115 Rc 1/8 VQZ100 Top V100 2 stations: 68 Addition per/station: 20 C4 (For 4) C6 (For 6) M5 (M5 thread) 2 to 20 stations VV3QZ22VQZ200 Rc 1/8 Top VQZ22 SY SYJ C6 (For 6

0.4

) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n:

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) [Communication connector D-sub] (76.8) (External pilot specifications) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

] C10: 10 One-touch fitting 2 x G 3/4 Electrical entry (L4) (L3) L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight