L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M
Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc3/8 22 to 24Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc3/8 22 to 24Nm 1.0MPa more Automatic water-fill
Table 3-10 Piping port size Description Port Recommended Recommended piping size tightening torque specifications Circulating fluid outlet port Rc1/2 28 to 30Nm 0.4MPa or more*2 Circulating fluid return port Rc1/2 28 to 30Nm 0.4MPa or more*2 Facility water inlet port *3 Rc3/8 22 to 24Nm 1.0MPa or more (Supply puressure: 0.3 to 0.5MPa) Facility water outlet port *3 Rc3/8 22 to 24Nm 1 For NPT
-COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.
50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 50
50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 50
wire length) Pg7 80.5 [82.7] 90.5 70.7 [72.9] 79.6 72.2 65.7 49.7 23.5 10.9 23.5 10.9 23.5 10.9 23.5 10.9 21 21 21 21 25 25 25 25 2-3.2 (For mounting) 2-3.2 (For mounting) 28 2-3.2 (For mounting) 2-3.2 (For mounting) 28 28 28 Refer to page 4-4-61 for dimensions with connector cable. 4-4-40 41 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Base Mounted (With Sub-plate) [
Content 15 CYR15EAbove numbers 26, 27, 28, 29, 30 25 CYR25E32 CYR32ENote 1) indicates the stroke.
Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)
(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.
Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)
(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer
(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.
40 Flat washer 10 7 7 10 5 32.5 + Stroke 28 37.5 + Stroke 40 Note 1) Standard strokes available in 5 mm increments.
55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-
VX3 Tightening Torque for Piping VXA Connection thread Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Recommended Unacceptable 28 to 30 Fig. 2 Binding tubes with bands 36 to 38 Wiring 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. Warning 5.
D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28
55 9 75 52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-
Each set of replacement parts contains the following: Wiper ring, rod seal, piston seal, valve seal, tube gasket, and push plate gasket (for 1 cylinder). 30 23 25 26 27 28 Bore size (mm) Kit no.
CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24