Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L2 (Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)]

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m), Unit Specification: M (SI Unit Only), Calibration Certificate: A (Yes)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only), Calibration Certificate: A (Yes), Flow Direction: R (Right to Left)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only), Calibration Certificate: A (Yes)

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 01 [R1/8 (M5 Female Thread)], Output Specifications: L2 (IO-Link/Switch: 1 output + 2 outputs), Lead Wire: N (None)

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 01 [R1/8 (M5 Female Thread)], Output Specifications: L2 (IO-Link/Switch: 1 output + 2 outputs)

Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Indicator Light: L2 [Neon Light (100 VAC/220 VAC)], Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Indicator Light: L2 [Neon Light (100 VAC/220 VAC)]

AC Servo Motor Driver (CC-Link Type)

. ## Description 00 Set to the test operation mode. 01 Station number 1 02 Station number 2 03 Station number 3 : : : : 62 Station number 62 63 Station number 63 64 Station number 64 Note 2. $$$ indicates numbers from 0 to 255, and the number indicates the executing point table number. 3. indicates the warning/alarm No. 4. Requires set up software(MR Configurator2TM) . -11- 3.

DOC1020530

When wires used for L11 and L21 are thinner than wires used for L1, L2, and L3, use a molded-case circuit breaker. 11. Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 12. The illustration of the 24 V DC power supply is divided between input signal and output signal for convenience.

AC Servo Motor Driver (CC-Link Type)

. ## Description 00 Set to the test operation mode. 01 Station number 1 02 Station number 2 03 Station number 3 : : : : 62 Station number 62 63 Station number 63 64 Station number 64 Note 2. $$$ indicates numbers from 0 to 255, and the number indicates the executing point table number. 3. indicates the warning/alarm No. 4. Requires set up software(MR Configurator2TM) . -11- 3.

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

Cylinder

In case of ~ 6 A In case 01 10,15 r I rn .' (ffi\ I I \ VJ / \.\WJ A A Parts List No. Description MBt~~ial Q., Flange busb Resin Trul'lnionlpin Stainless ... . Mate

Output Specification: RT (Switch output 1 + Switch output 2 + Analog voltage output), Units specification: w/Units Selection Function, Piping Specification: 01 (R 1/8), Option 1: W (Lead Wire w/Connector, 2m Waterproof), Option 2: None, Option 3: Y (w/o Operation Manual)

Output Specification: RT (Switch output 1 + Switch output 2 + Analog voltage output), Units specification: w/Units Selection Function, Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: A (Bracket)