Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPD CNTRL METALBODY W/FITTING, AIRLINE EQUIPMENT, AS FLOW CONTROL, AX, AS M5 (MISC./OTHER), .03086 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPEED CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .03858 lb

SYJ300-OMU0003

-49-1-1 500mm V100-49-1-2 A B A B A B A B 1000mm V100-49-1-3 A B COM (+)(-) COM (+)(-) 2000mm V100-49-1-4 5000mm V100-49-1-7 (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) 1 12 2 3 4 12 12326 Z-COM+COM A 26MIL B 14 No.SYJ300-OMU0003 SYJ Series EX510 Assy (SY3000-37-81A--N) SY3000-44-3A1 8 SYJ300 (SY3000-37-81A--) Assy 8 SY3000-37-81A-2-N 14 SY3000-37-81A-2-

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4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

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4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

VXA21/22

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

Process Pump <Fluororesin Type> Series PA3000

A for main wetted parts, stance is achieved! Clean You can order your process pump assembled in a Clean room environment and double-packaged (Order number PAP331m). Side bodies and ports are molded to achieve a great reduction in dust generation. Long service life Diaphragm are made from denatured PTFE for superior resistance and longer service life.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Speed Controller with One-touch Fittings

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

S 20 20 stations A,B port size R Port M5 0.8 M5T M5 0.8 A, B Port M5 0.8 A, B Port M5 0.8,N3T P Port M5 0.8 P Port NPTF N3T One-touch fitting Type 41(5 Port / Base mounted type) Applicable solenoid valve: SYJ3 40SYJ3 43SS5YJ341-05 --N3T Type 41 Type S41 Single solenoid coil is located on same side as the A, B port. ( ) Applicable blank plate ass'y: SYJ3000-21-2A Valve mounting direction

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

Table of Contents

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread C3 C4 C6 M5 Note) Refer to p.2.10-18 for inch-size One-touch fitting.

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ202 BG-VZ203 VQ VKF VV3Z2-50-061-C6 BG-VZ205 VQZ How to Order Manifold Base VZ 1 08 30 VV3Z2 VS 2(A) port size on base side Series VZ200 Manifold VFN Model Symbol VV3Z2-50 VV3Z2-S50 Symbol Stations Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) Symbol M5 01 M5 x 0.8 Rc 1/8 Built-in One-touch

SYJA3000

port) (Piping port) 21.5 R1 P 8.5 6 6 R2 15 1.8 (Bleed port) With filter (80 Mesh) 217 17 21 45.5 24 32 3 position closed center/exhaust center/pressure center: SYJA5 20-M5 3 position closed center/exhaust center/pressure center: SYJA5 40-01 3 4 5 3 4 5 28 2-M5 X 0.8 4.3 22-M5 X 0.8 37.5 23 (Pilot port) (Mounting holes) (Pilot port) (Mounting holes pitch) A B 1 A B 11 5 3 1 24 A B 1 1 R

One-touch Fittings

[mm] Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2H04-M5G1 8 7.9 7.7 10 17.7 14.7 13.3 4 4 2.5 3.3 6 M5 x 0.8 KQ2H06-M5G1 10 9.9 9.7 12 17.7 14.7 13.3 4 4 2.5 4.1 *1 D Oval type M A L 4, 6 H *1: D is the body diameter.

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station