Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (7.5) Dust-protected SI unit: L5 = 16n + 108, L6 = L3 + 25, L7 = L4 + 25 Dust-tight, Water-jet-proof SI unit: L8 = 16n + 118.5, L9 = 16n + 131 L10 = L3 + 50, L11 = L4 + 50 Formula

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (7.5) Dust-protected SI unit: L5 = 16n + 108, L6 = L3 + 25, L7 = L4 + 25 Dust-tight, Water-jet-proof SI unit: L8 = 16n + 118.5, L9 = 16n + 131 L10 = L3 + 50, L11 = L4 + 50 Formula

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Compressed Air Preparation Filter

Improved visibility due to 2-color indication Functional element (Green) Element requiring replacement (Red) 2 Modular Connection Type Compressed Air Preparation Filter AFF/AM/AMD/AMK Series Lightweight Series Size Weight [kg] Reduction rate [%] Weight AFF/AM/AMD1 20 0.19 b 0.38 50 Max. 50% lighter 1 30 0.39 b 0.55 29 0.19 kg b 0.38 kg 40 0.79 b 0.9 12 50 1.23 b 1.4 12 60 1.46 b 2.1 30 AMK2

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

/40/50/63 D-X 20B A Data Solid State Switch D-Y59 , D-Y69 , D-Y7P(V) A B A B Reed Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) 63 50 40 32 25 Mounting position 40 32 25 Mounting position 63 50 40 32 25 Mounting position A A 229.5 184.5 139.5 278.5 229.5 184.5 139.5 323.5 A 323.5 278.5 229.5 184.5 139.5 B B 110.5 95.5 180.5 121.5 110.5 95.5 180.5 136.5 B 136.5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P R1 R2 Indicator light 2-6.5 mounting hole 42.5 42.5

Air Cylinder Series MB

, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-F5LF D-P5DWL Bore size (mm) A A A A B A A A A B B B B B B B 32 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100

3 Position Cylinder Series RZQ

D-F9BAL B =U =U A B + First-stage stroke 50 or larger bore size D-P5DW 40, 50, 63 B + First-stage stroke =U =U Mounted on different side in case of a full stroke of 25 mm or less B A [mm] Proper mounting position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F D-F9 D-F9V D-F9W D-F9WV D-A79W D-F7LF D-A9 D-A9V D-F9BAL D-P5DWL D-A7,A80 Bore size (mm) A B A B

51

D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

27 27 34.5 37.5 Metric M5 x 0.8 M6 x 1 M8 x 1.25 M6 x 1.25 A 30.5 30.5 39 42.5 B 22 22 24.5 27.5 12 16 20 25 5.4 5.4 7 10 12 16 20 25 8 8 8 9.5 11.5 11.5 12.5 14.5 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.8 6.8 6.9 8.1 (All dimension are common except "A" and "B").

Title not found

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.