MQQ

A B C D E F Part no.

MQQ

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100

Air Pilot Operated Series NVSA

A B c D E F H J K M N o P o R s 2.95 (75) 2.52 {64) o.75 {t 9) 2.24 157't 0.91 123l 't.06 {271 1.97 {50) 0.83 {211 0.94 124) 0.16 t4) 1.34 (34) (31) 0.55 114l o.12 {3) 0.47 112't 0.73 (18.6) 0.98 125) lrillimeters in Parenthes PARTS LIST NOTES 1 Sp.ing t AXB3& O-Fim f aRp56+!

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 3 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog output

HRX-OM-X084

230V (50/60Hz) 20 *1 It is not possible to select only option D.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

VEX1

surge voltage suppressor (Except for grommet) Thread Rc(PT) T NPTF F G(PF) N NPT Rated voltage Air operated 1 100V AC (50/60Hz) 2 200V AC (50/60Hz) 3 110V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 12V DC 7 240V AC (50/60Hz) 9 Other Option Body size Port size Electrical entry (Only solenoid) Port size Rc(PT) P, A port R port Body size Electrical entry Port 01 1 02 VEX 1 8 1 8 G Grommet

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

MRHQ

60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure

PSxx-OMM0006CN

ISE40A0.050 MPa ZSE40A5.1 kPa ZSE40AF5.0 kPa ON OFF [F 2] OUT2 31 [F 1]OUT1 OUT1 -25No.PS-OMM0006CN-E [F 3] 33 2.5 ms [F 4] 34 [F 5] / 36 [F 6] 38 0 [F11] 39 1000 [F80] 40 OFF [F81] 41 OFF [F90] 42 OFF [F97] 44 OFF [F98] 46 [F99] 48 OFF -26No.PS-OMM0006CN-E [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE40AF ZSE40A ISE40A MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 kgf/cm 2 0.001 0.001

JA/JAH/JB/JS

x 1.5 M24 x 1.5 M30 x 1.5 M39 x 1.5 M48 x 1.5 16-150 20-150 24-150 30-150 39-150 48-150 40 50 63 80 100 40 50 63 80 100 CV Heavy load type MVGQ CC Precautions 2.

JA/JAH/JB/JS

x 1.5 M24 x 1.5 M30 x 1.5 M39 x 1.5 M48 x 1.5 16-150 20-150 24-150 30-150 39-150 48-150 40 50 63 80 100 40 50 63 80 100 CV Heavy load type MVGQ CC Precautions 2.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.

70pvpump

N T, F, N are options.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350