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Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

2 3 4 , ,1 1 2 3 4 50 25 10 7 25 173 80 60 98 Center 2-M6 X 1 X depth 9 160 150 79 53 13 18 100 60 116.5 70 Rc(PT) 1, 1 Rc(PT) 1 25 VEX5710 VEX5711 1 4 1 4 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 13 105.5 103.5 18 4-M6 X 1 X depth 6 136.5 60 17 82 c Bracket mounting dimensions h Grommet terminal i Conduit terminal g Grommet j DIN connector a Model b d e f VEX5510 VEX5511 19 130 110

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

(mm) Dimensions A B C D E F G H1 H2 J K L M N Model LVH20 LVH30 LVH40 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 17-5-29 27 Series LVH Dimensions/Threaded Type N Body material: Stainless steel Body material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking

-OM00801-B <> A [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) -26NO.ZK2-OM00801-B [F 3] <> [F 3] [F 3] -27NO.ZK2-OM00801-B [F 4] <> [F 4] [F 4] (29) ON/OFF -28NO.ZK2-OM00801-B OUT1 AP1 OUT1 OUT1 OUT1 A1L A1H P_1H_1 (n_1H_1 P_1=A-(A-B)/4 A= H_1=|(A-B)/2| B= 1 -29NO.ZK2-OM00801-B [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -30NO.ZK2-OM00801-B [F11] <> [F11

A M2 = F x L M3 = F x L M1 = F x L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection

= F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1

Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

above dimensions are for ZQ11U-J2 L-F.

Valley Hwy, Suite H-100 Kent, WA 98032 TEL: (425) 251-6955 FAX: (425) 251-6801 ITALY SMC Italia SpA FRANCE SMC Pneumatique SA HOLLAND SMC Controls BV SMC Corporation of America (Austin) 9101 Wall Street, Suite 1030 Austin, TX 78754 TEL: (512) 926-2646 FAX: (512) 926-7055 SMC Corporation of America (Milwaukee) 16850 W.

150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate

For Water Digital Flow Switch Series PF2W How to Order Integrated Display Type PF2W7 20 03 27 M Flow rate range Thread type 04 20 40 11 0.5 to 4 L/min 2 to 16 L/min 5 to 40 L/min 10 to 100 L/min Unit specifications Nil N F Rc NPT G With unit switching function Note1) Fixed SI unit Note2) Nil M Lead wire (Refer to page 322.)

150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

Deflection + L F F (Dimension when extended) + M Built-in coil scraper and Lube-retainer MAllowable lateral load graph MSelectable proximity switches CKZP57L TURCK P&F 400 Allowable lateral load [N] 350 300 250 200 MAdjustable connector angle 150 100 CKZP57L: 45, 90 CKZP71: 0, 45, 90 50 0 0 50 100 150 200 250 Offset distance L [mm] CKZP71 0 50 100 150 200 250 300 350 400 450 500