Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

AC Servo Motor Driver (MECHATROLINK-III type)

5 LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

AIR CYLINDER

3 1/5 Doc. no. CS2*-OM0237Q PRODUCT NAME AIR CYLINDER MODEL / Series / Product Number 25A-CS2*125160-** 3 2/5 Contents 1. Safety Instructions P.2 2.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Note 5) Consult P/A regarding drip-proof specifications (equivalent to IP54) .

ZSE F/ISE

Note 5) Value clear 0.01 psi in psi display.

Gun Type Ionizer

Blow setting Trigger setting 0 Trigger linked 1 1 Trigger lock 2 Continuous blow 3 s 3 5 s OFF timer 4 7 s 5 Trigger linked 5 6 Trigger lock 7 Pulse blow 3 s 8 5 s OFF timer 9 7 s Selection of blow setting M Continuous blow M Pulse blow Blows ionized air continuously. Pulse blow saves air.

MHL2

MHL2-25D MHL2-25D1 MHL2-25D2 SMHL, #4 (#4+#5) SMHL2B, #3 SMHL2B, #4 (#4+#5) 2.2-10 Series MHL2 Dimensions MHL2-32Dl 16 14 2-M8 X 1.25 Thread depth 11 (Mounting thread) D Closed J 22 A cross view (Fingers closed) C B 6H9 +0.030 0 Depth 8 64 6.45 5 5 7 4-M8 X 1.25 Thread depth 16 (Mounting thread) +0.030 0 6H9 Depth 8 Dimensions of auto switch mounting groove (Enlarged view) 35H9 +0.062 0

AC Servo Motor Driver (MECHATROLINK-II type)

5 LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

One-touch fitting Silencer 2.10-3 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Body Ported Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M C6 PR Series 1 VQZ100 Body width 10mm Bracket F None With bracket Configuration N.C.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

Precision Regulator

Note 5) Not applicable to both high and low temperature environments.

Fluoropolymer Tubing Variations

32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

Plate Cylinder with Lock Series MLU

1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

XM, XY

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

MGZ Series

Stroke (mm) Refer to the standard stroke table on page 5.