MLGP

44 50 63 5.5 5.5 7.5 10.5 200 200 200 25 24 44 44 300 300 300 M5 x 0.8 M5 x 0.8 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 30200200 200 200 25 24 44 44

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 30200200 200 200 25 24 44 44

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

1.05 MPa Maximum operating pressure 0.5 MPa Minimum operating pressure Note 1) 0.005 MPa 10 to 80C Ambient and fluid temperature Cushion Rubber bumper (Provided as standard) Lubrication Note 2) Not required (Non-lube) Rod end thread Female thread Rod end thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Piston speed Note 3) 0.3 to 300 mm/s (Refer to page 19.) 150 cm3/min or less 200

Series AP500

plated for AP9030 40 0.28 Dimensions 30 0.21 inch (mm) 20 0.14 AP9000 & 9100 10 0.07 3.5 (89) 0 0.00 0 200 400 600 800 100012001400 160018002000 Flow rate (slpm, N2) 0.75 (19) AP9030 600 psig (4.1 MPa) Inlet pressure: 300 2.1 250 1.7 Max. 11.2 (284.5) Delivery pressure (MPa) Delivery pressure (psig) 200 1.4 4.00 (101.6) 150 1.0 5.38 (136.7) 100 0.7 HP LP 50 0.3 0 0.0 1.13 (28.7) 0 200 400

25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Coolant Valve

thread) Valve sizes 2 to 4: VN-16 2 to 4 2 0 1 A VNC 15A (Except valve size 8, 9) Air operated External pilot solenoid 2 VNC 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Note) Electrical entry: D or DZ only Manual override Valve size Valve type Port size Rated voltage Nil: Non-locking push type Nil Air operated Symbol Orifice diameter (mm) Symbol Port size Rc 1 2 4 3 2 1 110 VAC 50/60 Hz 200

VT317

9 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT317 How to Order V100 Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications

VCS

Thread type Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Voltage Port size 1/8 (6A) Class 3 Class 2 Class 4 Symbol 01 02 03 04 06 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Please consult with SMC regarding other voltages.

VCW

VCW 20 1 G Clip Series Lead wire length 20 30 40 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 Class 2 Class 3 Class 4 Flat head screwdriver Voltage Solenoid coil 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Electrical entry Insert a flat head screwdriver into the hook section of the clip groove.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

AZ1000

Flow rate (slpm, N2) AZ1400T 2000 psig (13.8 MPa) 200 psig (1.4 MPa) Inlet pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA

Table of Contents

(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable

100

/Port exhaust) Suction flow rate (Branch/Port exhaust) Vacuum pressure [kPa] Vacuum pressure [kPa] 600 600 Suction flow rate (Silencer exhaust) Suction flow rate (Silencer exhaust) 500 500 400 400 Air consumption 300 300 Air consumption 200 200 100 100 0 0 Supply pressure [MPa] Supply pressure [MPa] Flow Rate Characteristics (Representative value) ZL3H (04P) ZL3M (04P) Supply pressure: 0.5

Digital Gap Checker

0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of switch ON [mm]

Magnetically Coupled Rodless Cylinder

, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.