1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Soft Start-up Valve AV2000/3000/4000/5000 1

VBA Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 VE G: Grommet Coil rated voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80

IIIIIII

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

73 AS321F-N02-09SD AS321F-02-12SD NPT 1/4 19 23 9.8 1.2 49.3 5/16" 15.2 29.5 41 18.5 44.3 32.8 22 12 20.9 82 76 21.3 54.8 AS321F-N02-11SD AS321F-03-06SD 3/8" 17.9 31.8 43.3 21 39.3 27.8 17 6 12.8 77 80 AS321F-N03-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5

Plug-in Unit

Cable side connector example: OMRON Corporation XS2G Power connector: Franz Binder GmbH Series 723, 5 pins (72309-0115-80-05) Cable side connector example: Franz Binder GmbH 72309-0114-70-15, etc. DIN type 5 pins No. Function (+) Sensor power supply Description 2 1 SW + Open 2 N.C. 1 Description No.

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

08-mb1-e

Square Tube Type Air Cylinder/Standard Type: Double Acting, Single Rod Series MB1 Replacement Procedure is 32, 40, 50, 63 80, 100, 125 P.284 Construction !6 !5 !8 !4 !7 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series MB1. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no.

08-mb1w-e

Square Tube Type Air Cylinder/Standard Type: Double Acting, Double Rod Series MB1W 32, 40, 50 63, 80, 100 125 Replacement Procedure is P.284 Construction Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !4 !6 !3 !5 !

08-mbk-e

Seal kit includes a grease pack (32 to 50: 10 g, 63, 80: 20 g, 100, 125: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Model without air cushion is designed to include rubber bumpers. 29

Fieldbus System

or less (SMC) Power supply 24 VDC, 2 A Fail safe HOLD/CLEAR/Forced power ON Protection Short-circuit protection Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition 0.6 lbs (300 g) Weight SI Unit (EX600-SDNlA) EX600-SDN1A EX600-SDN2A Model Protocol DeviceNet: Volume 1 (Edition 2.1), Volume 3 (Edition 1.1) Device type Group 2 Only Server Communication speed 125

HRX-OM-W060

of refrigerant kg 1.4 2.2 3.0 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125

HRX-OM-Y098

2.2 3.0 Control method PID control Ambient temperature C 2 to 45 Circulating fluid1 CH1 : Clear water,DI water (pure water)9 / CH2 : Clear water,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125

HRX-OM-X037

9.5.3 HRL300-A-40 CH1 0.7 Circulating 0.6 fluid outlet 0.5 Pressure [MPa] Lifting head [m] Usable flow rate range 0.4 0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow [L/min] Fig. 9-25 Pump capacity(HRL300-A-40 CH1) 9.5.4 HRL-A/W-40 CH2 It is available in case of Pressure control mode or Set output mode.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Free flow Controlled flow Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Model Port size Weight (g) AS420-02 2,500 1/4 38 3,600 55 0.34 AS420-03 5,000 3/8 77 4,800 74 0.33 63, 80, 100, 125 AS420-04 6,600 1/2 100 6,700 102 0.32 AS500-06 10,100 3/4 154 8,100 123 140, 160, 180, 200 0.36 AS600-10 15,100 1 230 16,900 258

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000

Air Cylinder MGQ Series Compact Guide Cylinder

Use a tishrenirE toqu of 0.05-0.rN.m(05-1.o2kgl.cm)-As a rcuqh guide, tishten the screw thrcush a flrih. 9d after teelins a tisht screv, (M2.5 x 4x ) Compact Guide Cylinder : Series MGQ XBII long stroke 32, 40. 50, 63, 80, 100 Same specifrcations as page 1. 125 ,150 ,17 5,20A MGQM . MGQL Common Dimensions

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper No rubber bumper Double-side

Serial Transmission System Series EX250 Series EX500

For the solenoid valve specifications and dimensions, please refer to VQC catalog (ES11-80). Please refer to page 13 for Series EX250 single SI unit dimensions.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling

Trimmer Auto Switch Series D-
7K/D-R
K

10 30 to 10 22.5 to 10 Angular gripper 180 opening/closing 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Air cylinder Compact guide cylinder MGP 3.5 5 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6 CA2 Air cylinder 4 4 6 6 6 Sensor unit D-F7K Air cylinder (mm) Model Bore size (mm) 12 4.5 16 20 25 32 40 50 63 80 100 125 7.5 140 7.5 160 CQ2 CM2 Compact cylinder 5.5 5.5 5 5.5 5.5 5.5 6 5.5 6 7.5 Air cylinder 3.5