Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7 250 0.94 340 1/8 90 0.7 250 0.94 340 1/4 115 2.3 810 2.3 810 1/4 130

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

I

NVF3540-0D Coiduit Tell|tlnal/NVF324O-OT,NVF334O-OT,WF344O-OT,NVF354O-OT ( ):3 positioo n:wilh irdictor light and aurge voltage suppressor ( ):3 position E:wiih indicator light and surge voltage suppressor @ SltJ'tr 15 Port Pilot Type/Rubber Seal L.lSeries NVFSOOO Compact slze and light weight -126inch widttl lrge flow capacity -cvz.s(%) FluidAir Ope6dng p].ru| rlngE 2 pGitlon dnglc 20-130

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Note 7) For motor with electromagnetic brake. 206 Non-standard Motor Compatible Drivers Yaskawa Electric Corporation Drivers for LJ1, LG1, LX Dimensions 45 2-6 Driver 149 160 6 A B 130 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector ) Signal description Command pulse input Command pulse input Command code input Command code input Deviation counter clear input

Low Profile Slide Table MXF Series

MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF

Compact Cylinder with Air Cushion and Lock Series RLQ

155 180 120 130 140 165 190 125 135 145 170 195 Mounting bolt 8 C Spring washer D Note) When mounting 50 to 63 cylinders from the rod side, be sure to use the attached flat washers because the bearing surface is limited. 9 13.5 12.5 Working principle Locked Unlocked Brake spring Lock ring Piston rod FREE Load Load direction LOCK Pivot Clearance Fulcrum LOCK Unlocking port: Air exhausted

PC Wiring System Series PCW

Orange 1.2 to 1.6 1 Series PCW-EC 16 Point Input/Output Branch Unit Dimentions Circuit board type Circuit board type 4-3.2 circuit board mounting hole + 4 4 CSO IN CS1 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) + 16.7 CSO 28.3 CS1 IN YMX-F4 45 0 1 2 3 4 5 6 7

EXxx-OMP0004CN

1/2 W SI CC-Link SI 17 ON CC-Link Ver.1.00 130 -12No.EX-OMP0004CN-I PWR INM12 5 B codeSPEEDCON 1 SV24 V +24V 2 SV0 V 0 V 3 SI24 V +24 V 4 SI0 V 0 V 5 M12 SPEEDCON SPEEDCON SPEEDCON 1/2 SPEEDCON M12 -13No.EX-OMP0004CN-I SV SI DC24 V /28 SV DC24V SI DC24V A.

EX260-SMJ_eng

CC-Link Ver.1.00 dedicated High-performance cable 130 1/2 W N/A Safety Instructions Byte 0 Offset Byte 1 Offset Byte 2 Offset Byte 3 Offset Bit: 7 0 Installation Note Use the internal terminating resistor only when the SI unit is placed at the end of the CC-Link main line. An external terminating resistor should not be used when the internal resistor is used.

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 230, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Cam Follower guide type, Table Size Width W(mm): 152, Table Size Height H(mm): 130, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 130, Piping