VFS

Material Description NVF2000-48 VFS21 VFS22 AXT624-19-1 AXT624-20-2 AXT624-20-2 AXT624-20-2 AXT624-26 AXT624-26 AXT624-26 !2 Detent assembly AXT624-11A VFS23/24/25 Return spring Gasket !1 Steel Hexagon socket head screw Stainless steel !0 o NBR !

CS1

295 17 24 25 31 60 48 46 63 50 74 20 39 to 1800 225 M56 X 2 277 141 55 275 140 355 180 420 M24 X 1.5 160 336 176 352 23 105 30 67 60 20 29 56 35 71 60 86 25 49 to 2000 0.17 X Stroke 270 1 M64 X 2 330 146 55 330 140 400 212 475 23 M30 X 1.5 175 369 115 190 384 30 33 80 76 70 96 60 20 30 65 48 49 to 2000 Long stroke With auto switch/125 to 200 only (mm) W/ rod boot (mm) Style Bore (mm) W/o

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) VT 59.5 [66] 47.1 VP 53.5 40.5 25 VG VP n-Rc (PT)1/8 (A port) VQ 8 23 A A 19.5 VQZ (Pitch) VZ P=19 20 [ ] for AC VS L plug connector (L) M plug connector (M) 59.5 [66] 10.5 53.5 53.5 10.5 1.5 1.5 23 8 23 8 70.9 [72.2] 39 39 66.9 80.5 25 25 4-Rc (PT)1/8 (P/R port) (Lead wire length) 300 70.6 [77.1] (Lead wire length) 4-R c(PT)1/8 300 (P/R port) 47.1 [ ] for AC Other dimensions

240

NS 20 20 25 25 40 40 50 70 70 LT 64 64 74 74 84 84 94 104 114 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 27 MXH Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting Applicable auto switch model (mm) Number of auto switches mounted D-A9, A9V D-M9, M9V D-M9W, M9WV D-M9A, M9AV 1 pc. 2 pcs. 5 10 5 5 5 10 Auto Switch Proper

MLGC

70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23 30 50 112 146 182 16 53 30 25 37 60 132 167 199 20 63 25 28.5 37 60 132 167 202 20 63 20 33 44 70 25 162 73 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

MLGC

70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W Z Bore size (mm) 20 25 32 40 30 23 30 112 146 182 16 53 50 30 25 37 132 167 199 20 63 60 25 28.5 37 132 167 202 60 20 63 20 33 44 162 210 227 25 73 70 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

4/5 Port Air Operated Valve Series SYJA3000

[111.8] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/Surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8

Auto Switch Guide

(Including band and screw) Cylinder series Applicable bore size (mm) 20 25 32 40 CDM2, CDBM2 CDLM2 BM3-020 BM3-025 BM3-032 BM3-040 Auto Switch Mounting Bracket Part No.

Micro Mechanical Valve Series VM1000

3 x 1/8 4 x 4.5 mounting hole T.T. 20 N F.O.F.

CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

Auto Switch Guide

(Including band and screw) Cylinder series Applicable bore size (mm) 20 25 32 40 CDM2, CDBM2 CDLM2 BM3-020 BM3-025 BM3-032 BM3-040 Auto Switch Mounting Bracket Part No.

HRX-OM-S004

capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-7 Cooling capacity(HRS100-W-20/40/46-) 8.4.4 HRS150-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 20 20 18 18 16 16 Cooling capacity [kW] 14 14 Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

LVQ

37.2 25 31.2 82 2 1 23.5 47 29.5 59 45.4 104.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 87.5 2 1 35 70 41 82 75 145 25 141 50.2 78.2 10 7 20 50.8 38.5 45 128 2 1 35 70 41 82 75 154.5 32 150 60 88 10 7 20 50.8 38.5 45 137.5 17-5-71 10 Series LVQ Dimensions With by-pass Double acting valve N M LVQ20 SMC C A B D (Max.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXQ 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) TN 20, 25 NPT TF 20, 25 G MXQ 12 13 50 M9N MXQ 12 22 50 M9N Number of auto switches Copper, fluorine and silicone-free + Low particle generation Nil 2 pcs.

SZ3000

Co., Ltd. 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 Cable 25 cores x 24AWG AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.