REC

4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 FX 20 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 20, 25, 32 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to 1000 26 36 40 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to 1000 32 S Z ZZ NN P H1 H2 I K MM N NA Bore size Stroke range 1 8 M20 X 1.5 20 146 191 200 150 to 700 M8 X 1.25 5 8 33.5 5 20 30 1 8 M26 X 1.5 25 146 195 204 150 to 700

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

20 stations 20 R Port Rc (PT)1/4 Note) If there are more than 6 stations in type 20 or more than 9 stations in 21 type, supply air to both sides of "P" port and exhaust air from both sides of "R" port.

VQ7-6/7-8

(20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override A B A B B PB B PB 75 (86) 62 (72) 108.5 (121.5) 141 (154) 153 (166) 75 (86) 62 (72) 50 38 50 38 Indicator light PA PA R2 R1 P R2 R1 P Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole 2-7.5 Mounting hole 49 (64) 49 (64) G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 153 (166) 141 (154) 108.5 (121.5) 50 (63) 5 3 38 (53) 32 (42

Vacuum Pad

Inlet, With Buffer How to Order p. 6 Dimensions p. 6 Construction p. 9 Parts Structure p. 10 Mounting Adapter Part Nos. p. 11 Buffer Assembly Part Nos. p. 12 1 Vacuum Pad 20, 25, 35, 50 Pad diameter How to Order ZP3P 20 PTSF Pad unit Pad diameter Symbol Pad diameter 20 20 25 25 35 35 50 50 Pad material Symbol Material SF Silicone rubber Complies with the FDA (USA Food and Drug Administration

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

Rotary Gripper Series MRHQ

0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa 60 100 Pressure 0.7MPa 0.6MPa Gripping force N Gripping force N 50 0.6MPa 80 0.5MPa 0.5MPa 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L

Bag Filter

FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

70pvpump

type 50 million cycles 50 million cycles Approx. 22 ml PA3000 air operated type 50 million cycles LVD Approx. 90 ml PA5000 air operated type 50 million cycles Approx. 21 ml PAX1000 built-in attenuator type 50 million cycles LVQ Approx. 4 to 5 ml PB1000 built-in solenoid valve type 20 million cycles These values are for pilot air pressure of 0.5 MPa, ordinary temperatures, and fresh water

Vacuum Pad

-B5 ZP3-Y06UM:15-B5 ZP3-Y06UM:20-B5 42.5 50 59 66.5 14.3 15.1 15.5 16.6 42.5 50 59 66.5 14.3 15.1 15.5 16.6 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

39

391.6 161 78 M10 x 1.5 22 10 Bore size (mm) PA PB PC PD R RB RC RD RR W XA XB XC RA 104.5 50 63 45 45 5 40 46 88 20 20 46 48 78.4 138.5 134 92 55 45 10 55 52 104 25 25 52 54 78 151 146.5 6 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Dimensions Model Selection CKZ3N North American Type Made to Order European Type CKZ3T Without switch XA (mm) Bore size (mm) XA 50 63 100.5

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

NCA1

Operating Pressure Ambient & Media Temperature Piston Speed Cushion Mounting types Air 250 psi (1.75 kgf/cm) 8 psi (0.06 kgf/cm) 40 ~ 140F (5 ~ -60C) 2 ~ 20 inch/sec (50 ~ 500mm/sec) Air Cushion Standard Basic, Foot, Flange, Center Trunnion, Side Tapped Standard Stroke List (in) Bore size Standard Stroke 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8,

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Compact Hydraulic Cylinder Series CH
KGB

Standard Strokes Bore sizes (mm) Standard strokes (mm) 20 & 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Made to Order Pages 22 to 24 Manufacture of Intermediate Stroke Cylinders Hydraulic Fluid Compatibility Intermediate strokes in 5mm increments can be manufactured by installing spacers

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

Aluminum High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

OMR0031

Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right. LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds 0.5 to 5.0 the set value.