Slider Type Ball Screw Drive/11-LEFS Series

8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work

Compact Guide Cylinder

/MGPKM Horizontal Mounting m m MGPKFM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 50 32, 40 32, 40 32, 40 10 10 32, 40 25 25 Load mass m [kg] Load mass m [kg] 20 20 25 20 16 16 25 20 12 12 16 1 1 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50

LX

) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Power Cylinder Series MGZR 20, 25, 32, 40, 50, 63, 80 Non-rotating Double Power Cylinder Series MGZ 20, 25, 32, 40, 50, 63, 80 Double extension output power (without non-rotating mechanism) 20 are 20 are and 25 sizes newly added. and 25 sizes newly added.

Modular Design with Uniform Body Style

-D IS10M-30-D IS10M-40-D IS10M-50-D IS10M-60-D p. 54 Slim type IS10M-20-1-D IS10M-30-1-D IS10M-40-1-D IS10M-50-1-D IS10M-60-1-D IS10T-50-m02-D IS10T-50-m03-D IS10T-50-m04-D IS10T-50-m06-D IS10T-30-m01-D IS10T-30-m02-D IS10T-30-m03-D IS10T-40-m02-D IS10T-40-m03-D IS10T-40-m04-D IS10T-60-m03-D IS10T-60-m04-D IS10T-60-m06-D Pressure switch with T-spacer*5, *6 p. 55 IS10T-20-m01-D IS10T-20-m02

RSQ

w/ Onetouch fittings are 20 to 50.

MXS Series Air Slide Table

0.035 0.10 0.04 0.030 0.08 MXS12-100 MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 to 16 20 to 50 Pad dia.

CHKD/CHKG

JIS Standard Compact Hydraulic Cylinder Compact Hydraulic Cylinder CHKD/CHKG Series CHQ CHK CHK CHN CHM CHS CHKD Series CH2 CHA Related Products DNominal pressure: 10 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 CHKG Series Nominal pressure: 16 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 263 JIS Standard Compact Hydraulic Cylinder 20, 25, 32, 40, 50, 63, 80, 100 CHKD Series

Electric Actuator with Integrated Guide

(kg) 300 L2 200 Mer a=1000 a=2000 a=3000 L2 (mm) Rolling Yawing m 100 L2 Mer 0 10 50 40 30 20 m Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 L3 (mm) L3 100 m Mey a 10 50 40 30 20 0 Transfer load m (kg) Refer to page 71 for deflection data. 46 50 Non-standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FNH(X10) Scale: 13% thread depth 9 4-M6 x 1 1.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

connector LO 110 VAC 50/60Hz 5000mm 50 3 With lead wire M [115 VAC 50/60Hz] M plug connector Without lead wire MN 220 VAC 50/60Hz 4 Without connector MO [230 VAC 50/60Hz] Without connector cable WO M8 connector For type "W", DC voltage is only available.

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Usable range

SYJ3000/5000/7000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

MNB

50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40

MNB

32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20

Thermo-chiller

Mechanical seal pump Impeller HRLE090-m-20/40 0.5 Usable range 50 Hz Circulating fluid pressure [MPa] 60 Hz 0.4 0.3 Usable range 60 Hz 0.2 50 Hz 0.1 Return port 0 0 10 20 30 40 50 60 70 Circulating fluid flow rate [L/min] * The pump capacity is the capacity of CH1 when 2 L/min are applied to CH2.

2/3 Port Valve

VXD2272/2382/2392 Solenoid Specifications Apparent power VA Inrush Holding Power consumption W (Holding) Temp. rise C (Rated voltage) 5 50 3.5 35 6 50 8 55 6.5 45 8 50 10.5 60 9.5 50 11.5 55 Frequency Hz 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 Model Power AC VXD21 DC AC VXD22 DC AC VXD23 DC Note) OThese are values in ambient temperatures of 20C 5C and application of rated voltage

1.63

= 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 10 10 25 25 25 25 25 25 20 20 20 20 20 20 MGJ JMGP 10 1 1 MGP 10 25 26 100 101 200 100 101 26 25 200 Stroke (mm) Stroke (mm) MGPW MGPW MGPWL32 to 63, MGPWA32 to 63 MGQ (23) L = 50 mm, V = 200 mm/s or less (24) L = 100 mm, V = 200 mm/s or less MGG 100 100 MGC MGF MGZ 50, 63 MGT 50, 63 50, 63 50, 63 50, 63 Load mass m (kg) Load mass