I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)
I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)
(Reduce power consumption by up to 20%.)
Same side 75 D-A79W 13 14 13 14 2 pcs. 1 pc. 5 5 10 5 15 10 15 15 D-F7, J79 D-F7V, J79C D-F7W, F7WV D-J79W, F7NTL D-F7BAL, F7BAVL D-F79F 20 Only size 40 and 50 can be mounted. 7 6.5 6.5 6.5 D-F7LF 7.5 7 5 7 7 5 D-P5DWL Hysteresis specifications are given as a guide, it is not a guaranteed range.
Same side 75 D-A79W 13 13 14 14 2 pcs. 1 pc. 5 5 10 5 15 10 15 15 D-F7, J79 D-F7V, J79C D-F7W, F7WV D-J79W, F7NTL D-F7BAL, F7BAVL D-F79F CLQ 20 Only size 40 and 50 can be mounted. 6.5 7 6.5 6.5 MLGP RLQ D-P5DWL 5 5 Hysteresis specifications are given as a guide, it is not a guaranteed range.
6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3
F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W
(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K
[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.
Note) The minimum bending radius of the D sub connector cable is 20 mm. Insulation resistance Mkm, 20C (68F) 5 or more 16 44 8 SMC Connector manufacturers Fujitsu Ltd. Japan Aviation Electronics Industry, Ltd. J. S. T. Manufacturing Co., Ltd.
BIT 2 5 Program designation <1> BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed. Used when executing steps (position movement). (Set by the binary system.)
Note) The minimum bending radius of the D sub connector cable is 20 mm. Insulation resistance Mkm, 20C (68F) 5 or more 16 44 8 SMC Connector manufacturers Fujitsu Ltd. Japan Aviation Electronics Industry, Ltd. J. S. T. Manufacturing Co., Ltd.
25 2m) 25 (10,0.7m) 107 267 460 R2 64 75 7001 1130 1120 R2 (17) 17) 40 1418) (14~18) 51 1276 1375 () (1) 1,3 (2) (1) 1,3 () 20 335 7122 670 752 (3) (3) (2) IDF100150F 6-3 6 2 IDX-OM-U021 6 IDF125F-30K16K () (10,2m) ) (10 ( 4 () () JIS 65A 10K 4x (K16K) 2m) 20 4x JIS 65A 10K 25 25 (10,0.7m) 78 9351 267 18 8x19 4x19 A A A 140 1130 140 1120 655 K 18 K 75 K16K (17) 64
ZPX40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX80HBNJ25-B01-A18 ZPX 80HBNJ50-B01-A18 75-B01-A18 ZPX100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 418 268 Misc. 40 50 63 80 100 125 0 +10 +1 1 441 289 0 +19 +1 2 684 312 0 +37 +2 3 723 284 0 +61 +2 6 767 305 100-B01-A22 ZPX125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 1 +121
0.14 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) .69'' (17.5) 2.00'' (50.8) A A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.
Nq Body size 20 25 30 40 50 60 Symbol Description Nw With backflow function Nil Without backflow function K*1 With backflow function + Ne Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Nr Port size a Mounting Nil Without mounting option B*3 With bracket H With set nut (for panel mount) + Nil Without pressure gauge E Square embedded type pressure gauge (with
(mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.
IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20