m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10 to 50,75,100 84.5 103.7 12 6.6 4 30 LX LZ 30 10 to 50,75,100 104 123.2 12 6.6 4 33 A + Stroke 40 10 to 50,75,100 104 124.2 12 9 5 39 B + Stroke L 25, 30, 40 Bore size (mm) LS LT LX LY LZ X Y 10 49.5 2 38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH 20 64 3.2 52 46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y 4-LD LT 30 88 3.2 64 64 78 11.2 7 LS + Stroke LX 40 81 3.2 79 78 95

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26 Y 54.5 64 72 79 93 M 5 5 6 7 8 TC 17 20 22.5 28 33 Z 94 107 117 130 148 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 W 25 40 40 50 60 X 18 22 28 35 40 N 6 7 6.5 8.5 11 WP 16 19 21.5 27 32 PW 32 38 43 54 64 Q 84 95

Modular Type Regulator Series AR

Max. 5 Pressure gauge (option) L B Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Process Pump <Fluororesin Type> Series PA3000

Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual reset Air pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT Rc, G, NPT, NPTF 3/8 140 8 110 14 6 81 84 67 30 13 26 10 FLUID IN Rc, G, NPT, NPTF 3/8 EXH (P2) Rc, G, NPT, NPTF 1/4 PAP331m(with tube inlet/outlet) P11m P13m 152 2-M5 with depth 8 4-7 139 64 10 10 120 95 Bottom view without foot SUP (P1) Rc, G, NPT, NPTF 1/4 Manual

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

20M -M3 30.5 19.5 30.5 19.5 About 300 5.3 1.8 1.8 5.3 8.2 8.2 (Lead wire length) 4 4 A B B A 7 21.8 (Mounting holes for manifold) 7 21.8 (Mounting holes for manifold) 36.7 (Lead wire length) 84.4 39.1 [45.6] About 300 Bracket Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 15.6 20 18.5 18.5 13.5 13.5 9 9 50.4 40.7 [42] 111.6 92.4 [95

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5 196.5 300 369 L1 77 115.5 154 231 346.5 269.5 192.5 308 385 VV2CW3 L2 89 127.5 166 243 358.5 281.5 204.5 320 397 L3 101 139.5 178 255 370.5 293.5 216.5 332 409 L1 83 124.5 166 249 373.5 290.5 207.5 332 415 VV2CW4 L2 95

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

) 1/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95

LEC-OM02704CN

6-40 7 MR Configurator 717-27 7.1 72 7.2 73 7.3 75 7.4 76 7.5 78 7.6 7-10 7.7 7-14 7.7.1 JOG 7-14 7.7.2 7-17 7.7.3 7-19 7.7.4 (DO) 7-20 7.7.5 1 7-22 7.8 7-24 7.8.1 7-24 7.8.2 7-25 7.8.3 7-27 8 818-12 8.1 82 8.1.1 82 8.1.2 MR Configurator 83 8.2 84 8.2.1 84 4 - 8.2.2 85 8.2.3 86 8.2.4 87 8.3 88 8.4 8-12 9 919-16 9.1 92 9.2 92 9.3 95

AC Servo Motor Driver (CC-Link Type)

Input signals (Input devices) . 82 6.5.2 Detailed explanation of Output signals (Output devices) . 87 6.5.3 Detailed explanation of Remote registers input . 89 6.5.4 Detailed explanation of Remote registers output . 91 6.6 Monitor1 (RWwn) Monitor2 (RWwn+1) . 92 6.6.1 Timing chart of monitor . 93 6.6.2 Pxrogramming example of the monitor . 94 6.7 Read instruction code No. (0h to 0AFFh) . 95

OMR0031

Troubleshooting . 90 4 - 18.1 Operation errors . 90 18.2 Position-Speed-Pushing Force errors . 93 18.3 Configuration software . 95 5 - LATCA Series Controller 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.49

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.49

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22