Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-41 41 Date issued: Photo copying this page is recommended.

Title not found

E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT (mm) A One-touch fitting d Part No.

Air Cylinder Series MB

41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21 26 31 39 39 79.5 69.5 Note 1) When using cotter pin, flat washer is used together.

Ionizer Series IZS40/41/42

RoHS Ionizer Series IZS40/41/42 How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Electrode cartridge type/Electrode needle material Feedback sensor cannot be used for the

One-touch Fittings

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 Use the part number below to order the gasket for M5 thread. Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Series HAW Water Cooled Aftercooler 1

HA Accessory (Option) AT HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Applicable model Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 ID Auto-drain AD402-04 AD600-06 AD600-10 AMG Model Selection (Flow Capacity l/min (ANR)) AFF HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model 1000 70C 100C 180C 50C 2000 6000 12000 15000 22000 30 Inlet air temperature

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

CE2

For details, refer to page 10-20-41. 5 6 6.5 6.5 7 Data 6 7 7.5 7.5 8 9 9 10 10 11 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option models

Series VCL

11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option models

Series VCS

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under

Air Cylinder

35 37 34.5 36.5 31 33 35.5 37.5 29.5 31.5 32 34.5 Rod end 48 27 (36) 44 23 (32) 43.5 22.5 (31.5) 40 19 (28) 44.5 23.5 (32.5) 38.5 17.5 (26.5) 41 20.5 40 (29.5) Double end 48 41 44 37 43.5 36.5 40 33 44.5 37.5 38.5 31.5 41 34.5 Head end 46 49 42 45 41.5 44.5 38 41 42.5 45.5 36.5 39.5 39.5 42.5 Rod end 58 32 (44) 54 28 (40) 53.5 27.5 (39.5) 50 24 (36) 54.5 28.5 (40.5) 48.5 22.5 (34.5) 51.5