Series 12-REA Sine rodless cylinder

36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23

Booster Regulator/Air Tank

Then, the charge time (T) for a 100 L tank: T = t x = 17 x = 17 (s). V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

8.5 4.5 46 17 17 1.5 62 156 (189): With auto switch 144 (177): Without auto switch 212 (245): With auto switch 200 (233): Without auto switch 236 (269): With auto switch 224 (257): Without auto switch The dimensions above show pressurization to B port.

Shock Absorbers and Rate Controls

8.6 M5 30 Prtl!+-l2 M5t?91$53 (rR)0tM% 8.612.7 60.57 6.2 \7 '' 41.4 Rttt42xl.5 M52940053 (Ln)0Il,lr.5M 8.6t2.7 60.57 6.2 57 .2 41.4 M8 260 Rt[E5x2 M5ffim530$13.0 13.519.1r0 t.5127.0 101.6 1b.2 Lil S A lciimensions in millimeters. qiffi.

Digital Gap Checker

Specifications (2 port solenoid valve) 17 Characteristics graph 18 Dimensions 21 Mounting and Installation 27 Piping 27 Installation 30 Installation Wiring 35 Part structure 39 Outline of setting 42 Measurement mode 43 Switch Point Setting 45 OUT1: Switch point OUT2: Pressure setting 45 Default settings of OUT1 45 Default settings of OUT2 46 Preparation before setting 47 How

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2

3

56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

Series SYJA300 3 Port Air Operated Valve

holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13 5 8.6 10 (P, A, R port) 3-M5 X 0.8 23 3.3-2 3 Port Air Operated Valve Series SYJA500/700 Model Valve model Actuation Port size Weight (g) Pilot port size Effective area (mm2) (Cv) SYJA512-M5 N.C. 3.6 (0.2) 45 Body ported M5 X 0.8 SYJA522-M5 N.O.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Width across flats 3 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA20 MSUA20-S, SE Scale: 50% 8-M5 x 0.8 depth 10 C Top ports/MSUA20-SE 78 A port B port 14 2-M5 x 0.8 B 48 59 38 15.5 42 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (positioning pin hole) A 22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 ( A , B , C ) 4 2-6.6 through 3-R2 3-R2 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

35 Motor mounting position: Right side parallel Motor mounting position: Left side parallel 106 4 106 48 5 3H9 (+0.025 0 ) depth 35 3H9 (+0.025 0 ) depth 35 8 46 46 47 47 H G *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

RSH/RS1H

A repulsion preventing mechanism keeps light pallets, etc., from being pushed back by the reactive force of the shock absorber's spring. 10-9-17 17 Stopper Cylinder Series RSA 50, 63, 80 How to Order RSA 50 D L Z73 30 Number of auto switches Bore size 2 pcs. 1 pc.

RSH/RS1H

A repulsion preventing mechanism keeps light pallets, etc., from being pushed back by the reactive force of the shock absorber's spring. 10-9-17 17 Stopper Cylinder Series RSA 50, 63, 80 How to Order RSA 50 D L Z73 30 Number of auto switches Bore size 2 pcs. 1 pc.

Rotary Cylinder Series MRQ Size: 32, 40 1

Width across flats 12.2 2-M5 x 0.8 (Plug, Back side) Port size (Rotary motion) 113 (Rotating angle 180: 144.5) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch Linear motion Rotary motion 4-M5 x 0.8 depth 7 A port Port size (Linear motion) Port size (Rotary

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42 30 6.5 7 19 102 4.0 32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT

LEF-OM002xx

(Only "With motor cover") (Nm) M2.5 0.3610% M3 0.6310% M4 1.510% M5 310% The fingernail of "Grommet" is inserted in the hole of "Pulley box". Grommet 43 - 7. Troubleshooting Alarms below are abstract of representative examples. For other alarms, see operation manual of controller. No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120