NCQ2/CQ2

14 30 M14 x 1.5 12 14 32,40 10 18 0.3 0.5 22 +0.058 0 I-G05 56 18 40 M18 x 1.5 16 20 50,63 14 22 0.3 0.5 28 +0.070 0 I-G08 71 21 50 M22 x 1.5 21 27 80 18 28 0.3 0.5 38 +0.070 0 I-G10 79 21 55 M26 x 1.5 24 31 100 22 32 0.3 0.5 44 +0.084 0 Y-Z015A 28 11 21 12 16.6 M6x1 8.1 10 12 16 6.5 +0.2 +0 5 +0.048 0 IY-J015 Y-G02 34 8.5 25 16 21 M8x1.25 10.3 11.5 16 20 8 +0.4 +0.2 8 +0.058 0 IY-G02 Y-G03

1

16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58

Hydraulic

x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

Made to Order

A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 39 st 4 11 to 99 st 11 to 39 st 55 41 to 99 st 16 41 to 99 st 12 16 39 12 16 43 43 49 0 6 65 22 A E A E Bore size (mm) Bore size (mm) 21 to 74 st 0 21 to 39 st 10 21 to 74 st 61.5 21 to 39 st 74 76 to 199 st 14.5 41 to 199 st 27 76 to 199 st

5 Port Solenoid Valve Series SV1000/2000/3000/4000

63.5 60 52.5 12 (For DIN rail mounting) (7.5) B B B B n1 = Valve stations n2 = Input block stations 145.6 127.6 L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4) /2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A B A L1: DIN Rail Overall Length Valve stations (n1) 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 Input block Stations(n2) 0 1 2 3 4 5 6 7 8 485.5

Air Cylinder Series CM2

18 20 21 M8 x 1.25 15.5 30.3 33.5 15 8 1 25 8 31 6 107 22 76 17 10 5.5 8 30 29 15 43 12 39 22 26 25 19.5 36.3 33.5 18 M10 x 1.25 8 1 32 8 31 6 109 22 78 17 12 5.5 10 29 15 43 12 47 22 26 30 19.5 42.3 37.5 34.5 21 M10 x 1.25 4 1 40 11 34 8 138 27 104 22 14 7 12 49 15 24 21 32 38 M14 x 1.5 52.3 46.5 42.5 58.5 37.5 21.5 26 With Air Cushion (mm) Bore size W NB WB WA NA 20 8.5 17.5 13 27 31.5

Air Cylinder

21 25 39 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 6 13 20.5 32.5 44.5 16 6.5 12.5 21 33 45 51 75 93 105 6 5.5 12 12 21 25 39 D-M9lV 10 6 13 13 20.5 32.5 44.5 16 6.5 12.5 12.5 21 33 45 51 75 93 105 6 1.5 8 17 21 35 Band mounting D-A9l 10 2 9 16.5 28.5 40.5 16 2.5 8.5 17 29 41 47 71 89 101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5 16.5 20.5

Air Cylinder Series CA2

MM 16 22 24 10 55 M14 x 1.5 13 25 12 38 55.5 3 x 18l Polished round 12 40 Y-04D +0.3 +0.1 CJ1 E1 NX NZ L CJP 16 27 28 14 60 M18 x 1.5 15 27 12 38 55.5 3 x 18l Polished round 12 50, 63 Y-05D +0.3 +0.1 D1 CJ2 28 37 36 18 71 M22 x 1.5 19 28 18 55 76.5 4 x 25l Polished round 18 80 Y-08D +0.3 +0.1 A1 L1 U1 CM2 30 83 37 40 21 83 M26 x 1.5 21 38 20 61 4 x 30l Polished round 20 100 Y-10D +0.3 +0.1

ZP

Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10

Table of Contents

-12 22.45 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole) I J K L M N O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) 5 10 1 1 3 3 6 6 6 19 45 45 15 20 25 30 35 40 45 50 75 100 Male thread 12 3 6 12 24 52 54 106 106 240 350 55 63 71 79 87 95 Rod end male thread Nut 16 2 4 8 16 34 34 64 64 98 232 88 99 110 121 132 143 With rubber bumper 20 0 0 2 2 3 7 12 19 34 54 135 152 169 186 203 220 237 254 271 288 Built-in One-touch fittings 25 12 12 21 21 182 199 216 233 250 267 284 301 318 335

AC Servo Motor Driver (Network card type ）

App.-21 App .9 Recommended parameter values for each actuator . App.-22 12 - 1. FUNCTIONS AND CONFIGURATION 1.

AC Servo Motor Driver (Pulse input type/Positioning type ）

protocol . 12-9 12.6.1 Data transfer procedure . 12-9 12.6.2 Transfer method . 12-10 12.6.3 Home position setting . 12-19 12.6.4 Use of servo motor with an electromagnetic lock . 12-21 12.6.5 How to process the absolute position data at detection of stroke end . 12-22 12.7 Absolute position data transfer errors . 12-22 12.8 Communication-based absolute position transfer system . 12-24 12.8.1

CA2

, 16 85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) With 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 (

CL

) CLM2L25SCLM225, #3 (#1+#3+#12) CLM2L32SCLM232, #3 (#1+#3+#12) CLM2L40SCLM240, #3 (#1+#3+#12) CLM2G20SCLM220, #5 (#1+#5+#12) CLM2G25SCLM225, #5 (#1+#5+#12) CLM2G32SCLM232, #5 (#1+#5+#12) CLM2G40SCLM240, #5 (#1+#5+#12) 3.1-21 Series CLM2 Front Flange (F) CAD CLM2F Bore size Stroke Boss cut (mm) BP Bore Stroke range BN 80 90 90 BQ BZ E FZ 75 75 75 82 D 8 10 12 14 B 34 40 40 52 FD 7 7 7 7 GA

KJ

12 12 13.7 15.6 15.6 18.8 18.8 5 9 8 10 9 12 23 22 34 36 16 17 16.5 17 17 18.5 21 21 22 22 5 32 15.5 2.5 1 8 1 4 3 16 5 32 16 3 1 4 3 16 1 4 16.5 3.5 5 16 1 4 17 4.6 3 8 3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Applicable tubing Note) D: Max. diameter Plug-in Y: KQ2U Applicable tubing O.D.

KR

KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5 15-3-24 1 Miniature Fittings Stainless Steel 316 Series MS For use in corrosive environments Stainless steel Compact piping space Tube has a large retaining force.

ZP

width across flats (M6: 8, M8: 12) ZX Hexagon widthacross flats 12 Hexagon widthacross flats 12 ZR Applicable tubing O.D.

Table of Contents

12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21 Grommet Rail D-F59F Rail D-F7BAL/F7BAVL 12-13-22 Tie-rod D-F5BAL Grommet D-Y7BAL 12-13-24 Direct D-F9BAL 12-13-23 D-F7NTL Rail Grommet Tie-rod D-F5NTL Note) As for the applicable auto switches on Rotary Actuators, refer

ZP

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.