Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 3 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: NPTF 1/8

Mist Separator Series AFM20/30/40

40 J (5) Drain guide 1/4 AFM30/40 Float type auto-drain (N.C.) (4) Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right Left AFM20 to 40 N (1) Drain cock with barb fitting: 6 x 4 nylon tubing Float type auto-drain (N.O.) (4) W F (2) AFM30/40 D AFM30/40 Note 1) Drain guide is NPT 1/4 (applicable to AFM30 and 40), and the exhaust port for auto-drain comes

VZ3000

-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 MAX. 10 3-3-36 Series VZ3000/Base Mounted Manifold Specifications Manifold Standard Manifold Specifications Type 40 Type 41 Type 42 Type 43 Model Manifold

Micro Mist Separator Series AFD20/30/40

Micro Mist Separator Series AFD20/30/40 How to Order 03 BD F 30 2R AFD Option Symbol 2 6 8 C J R Description Applicable model Micro mist separator Accessory AFD20 to 40 AFD20 to 40 AFD30/40 AFD20 AFD30/40 AFD20 to 40 Metal bowl Port size F.R.L. Description With bracket Float type auto-drain (N.C.) Float type auto-drain (N.O.)

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

ITV

VBA VBAT AP100 841 Series ITV009 Dimensions Manifold 27.5 40 40 27.5 4 x M3 x 0.5 thread depth 3.5 Mounting hole 11 11 25 L1 L2 Port Location z x c 8 No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Box type (Built-in silencer) B S 07 ZH 06 06 Body ported type (Without silencer) D S 07 ZH 01 01 01 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in

Air Suction Filter With One-touch Fittings ZFB Series

ZFA Symbol ZFB ZFB ZFC How to Order Metric size Applicable tubing size Metric size (Release button: Light gray) Symbol Bore size Applicable model ZFB 0 04 10 Metric size ZFB10 ZFB20 ZFB30 04 06 08 10 4 6 8 10 ZFB 1 10 05 Inch size Inch size Symbol Bore size Applicable model Body type ZFB10 ZFB20 ZFB30 ZFB40 Symbol Filtration area (mm2) 05 07 11 13 3 16 1 4 " " 10 20 30 40 1037 1584 1980

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Ambient temperature of servo motor Check environment so that ambient temperature is 0 to 40 . is over 40 . 2. Servo motor is overloaded. 1. Reduce load. 2. Check operation pattern. 3. Use servo motor that provides larger output. 3. Thermal sensor in encoder is faulty.