11.5 11 4 CRBU2WU30-S 0 0.043 0.005 0.014 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 8 16 2 22 50 47.5 29 17.5 12 1 12 13 4.5 98 Series CRBU2WU Rotary Actuator with Angle Adjuster Free Mount Type Dimensions: 10, 15, 20, 30 (With angle adjuster) Double vane type CRBU2WU10-D CRBU2WU15, 20, 30-D Figures below show size 20 actuators.
CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]
A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10
A A1 E1 L1 NZ 16 16 20 22 28 38 44 34 41 42 56 71 79 25 30 30 40 50 55 20 25 32, 40 50, 63 80 100 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 34 41 42 56 71 79 25 30 30 40 50 55 IY-G02 16 20 IY-G03 20 22 IY-G04 36 28 IY-G05 44 38 IY-G08 56 44 IY-G10 Knuckle pin and snap ring are included. 64 Knuckle Pin (Common with double clevis pin
x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20
A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10
[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-
SS3YJ3-20R Applicable base Sub-plate SS3YJ3-41 SS3YJ3-S41 SS3YJ3-42 SS3YJ3-S42 SS3YJ3-42R SS3YJ3-S42R Applicable base SS3YJ3-20 SS3YJ3-20R Applicable base Sub-plate SS3YJ3-41 SS3YJ3-S41 SS3YJ3-42 SS3YJ3-S42 SS3YJ3-42R SS3YJ3-S42R Manifold base Manifold base Manifold base Manifold base Caution Mounting screw tightening torques M1.7: 0.12 Nm Use caution to the assembly orientation for solenoid
/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04
1.90 C8 1.80 0.16 0.23 0.45 0.44 SS5Y5-42 2 to 20 (1) 1/4 1.90 C8 1.90 0.12 0.20 0.43 0.46 Valve stations Location SS5Y7-42 1/4 3.00 C10 3.00 0.12 0.25 0.66 0.75 Base 4/2 (A/B) Porting spec.
Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.
TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.
20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.
Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise
(only tor type 41, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?
(only tor type 41, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?
Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10
the 3 way valve flows out the manifold B port. 42
, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15
(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8