smcmaintenancepartslist

Contents Bore size (mm) 12 16 20 25 32 40 50 63 MK12Z-GS MK16Z-GS MK20Z-GS MK25Z-GS MK32Z-GS MK40Z-GS MK50Z-GS MK63Z-GS Set of left nos. !0, !1, !2 Guide pin kit includes numbers in the table. Order the guide pin kit, based on each bore size.

Process Valve Series VNA

Slotted locking type B (tool required) Note) 2 Note 1) Electrical entry: D or DZ only 15A 1 2 15 14 3 20 16 Note 2) Semi-standard 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Electrical entry/With light/surge voltage suppressor Flange E GS G Symbol Electrical entry Valve size

Vacuum

(mm) 0 2 o 2 0 4 a 4 0 6 0 6 0 8 0 8 1 0 0 1 0 13 s13 1 6 s 1 6 20 s2O 25 o25 92 o32 40 s4O 50 o50 S Silicone rubber U Urethane rubber F Fluorine rubber GN Conductive NBF (o2-o16) GS Qonductive Silicone (o2-o 16) Vacuum thread dia.)

Vacuum

(mm) 0 2 o 2 0 4 a 4 0 6 0 6 0 8 0 8 1 0 0 1 0 13 s13 1 6 s 1 6 20 s2O 25 o25 92 o32 40 s4O 50 o50 S Silicone rubber U Urethane rubber F Fluorine rubber GN Conductive NBF (o2-o16) GS Qonductive Silicone (o2-o 16) Vacuum thread dia.)

3

Grease pack part no.: GR-S-010 (10 g) Replacement Parts/Guide Pin Kit 25 MK25Z-GS 32 MK32Z-GS 40 MK40Z-GS 50 MK50Z-GS 63 MK63Z-GS Bore size (mm) Kit no. Contents 12 MK12Z-GS 16 MK16Z-GS 20 MK20Z-GS Set of nos. above Guide pin kit includes numbers in the table. Order the guide pin kit, based on each bore size.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

D C 2 2 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5

Vacuum Pad: Ball Joint Type

F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 16 18 32 35 2 13 16 49 40 50 ZPT F-B5-A14 (Without buffer/Male thread) M14 x 1 M5 x 0.8 Hexagon width across flats 19 5 5 20 D 5

2/3 Port Valve

7 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15(11) 2 9 Others 20(14) 3 Option 25(16) 4 1 1 Valve size 2 to 9 1 4 32(22) 5 1 B 1 4 32F Flange 40A 1 1 2 40(28) 6 1 B 1 2 40F Flange Electrical entry/Indicator light and surge voltage suppressor 2 50A Nil 50(33) 7 50F G Grommet Air operated 2B Flange E GS Grommet with surge voltage suppressor Grommet terminal 2 B 1 2 65F 65(45) 8 Flange Grommet terminal

•

GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'32 ,,~ listO Pad Dia.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

VFS

stations Porting specifications (A, B) 2 2 2 2 2 2 2 1 Passage 10 Number of manifold blocks required for mounting (stations) Symbol 10 stations R1, R2 P Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations 1 Side 2 Bottom Common Common Option Please indicate manifold base type, corresponding valve, and option parts.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100-B04A) for the unused conduit port (G 1/2).

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

pilol 0.08(2) 2 ~ting "" I 0.51~n(12) Opemtorport \IDJ-v!}]

5 Port Solenoid Valve Series VQZ1000/2000/3000

Symbol Specifications DC AC VQZ1000 VQZ1000-GS-2 (0.35 W) Nil Standard VQZ2000 VQZ2000-GS-2 (0.9 W) B Note) High speed response type VQZ3000 VQZ3000-GS-2 High pressure type (Metal seal type only) (0.9 W) K Note) Note) Above part number consists of 10 units. Each unit has one gasket and two screws. Purchasing order is available in units of 10 pieces.

0.

Model VQZ100 VQZ100-GS-2 V115 X110 5 Y VQZ200 VQZ200-GS-2 VQZ300 VQZ300-GS-2 Function Note) Above part number consists of 10 units. Each unit has one gasket and two screws. Purchasing order is available in units of 10 pieces.

60

Model Valve Model Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll 1 2 3 4 7 8 J Nil 2 1 2 3 VXK21ll VXK22ll VXK23ll N.C. N.O.

ZP

Elliptic pad 2.

G15/G27

Note 2) Cover ring assembly is not available. Type Symbol Unit Type Symbol 0.2 MPa 0.4 MPa 0.7 MPa 1.0 MPa 1.5 MPa 0.2 MPa, 30 psi 1.0 MPa, 150 psi 2 4 7 10 15 P2 Note) Back side thread Nil G Vertical side thread A GS Pressure gauge PPA P10 Note) Note) This symbol must be used with Option X30.

ZP

Fluoro rubber GN Conductive NBR Pad type GS Conductive silicon rubber U Flat Dimensions 7 7 7 12 12 12 1.8 2 1.2 0.5 0.8 0.3 2 2.6 4.3 3.5 5 4 4 4.6 7 10 11 7.8 ZP2004U ZP3507U ZP4010U 13-11-61

Table of Contents

GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 Round type 0.2 MPa (4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.